Design and Fabrication of Micro-Coil Sensor Array by Using UV-LIGA Process

Zhi Xiang Xu; Feng Juan Jiang

doi:10.4028/www.scientific.net/AMM.300-301.585

Paper Titles

Application of Mobile Robot System for Cell Production
p.566

Implementation of Sun Tracking for Solar Cell with Maximum Power Point Tracking
p.572

Construct Small-Scale Vertical Axis Wind Turbine Monitoring System by Wireless Sensor Networks
p.576

Battlefield Awareness Network Research Based on Intelligence Role Division and Wireless Sensor Network
p.580

Design and Fabrication of Micro-Coil Sensor Array by Using UV-LIGA Process
p.585

Monitoring of Human Driver Behavior by Vehicle Trajectory Reconstruction for Transportation Safety Management
p.589

Structural Optimization of MEMS-Based Hydrophones with Perforated Active Membrane
p.597

Fault Detection of Robot Control Systems Based on Available Wireless Network Measurements
p.604

The Research And Design of Wireless Coal Mine Safety Network Monitoring System On The Basis of ZigBee
p.611

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 300-301Design and Fabrication of Micro-Coil Sensor Array...

Design and Fabrication of Micro-Coil Sensor Array by Using UV-LIGA Process

Abstract:

A micro-coil array is designed and fabricated in this contribution by MEMS (Micro Electro Mechanical Systems) approach. The array’s width is from a dozen microns to several tens of microns. UV-LIGA process is used to fabricate the array by means of sputtering, lithography and electroforming. The sensor array is based on 300μm thick silicon wafer, and is composed of single excitation Cu coils, two serial detection coils. Detection coils are sized from 10μm×10μm, 20μm×15μm to 30μm×15μm respectively, with 10 turns. Successful fabrication of the micro-coil sensor demonstrates the feasibility of UV-LIGA process for miniaturization of micro-coils.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 300-301)

Pages:

585-588

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.300-301.585

Citation:

Cite this paper

Online since:

February 2013

Authors:

Zhi Xiang Xu, Feng Juan Jiang

Keywords:

Micro-Coil Sensor Array, Micro-Crack, Nondestructive Testing (NDT), UV-LIGA Process

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Barranger JP. Eddy current jet engine disk crack monitor. Mater Eval 1984; October: 1374.

Google Scholar

[2] Yan H, Zhong PD, Xi NS, Tao CH. A case study of cracks in aeroengine compressor discs Engineering failure analysis. New York: Pergamon Press Inc.; 1999. p.1.

DOI: 10.1016/s1350-6307(99)00018-7

Google Scholar

[3] D. E. Bray and R. K. Stanley, Nondestructive Evaluation: A Tool in Design, Manufacturing, and Service. Boca Raton, FL: CRC Press, (1997).

Google Scholar

[4] Vuillerrmoz PL, Eddy currents: principles, measurment and testing. AFNOR, (1994).

Google Scholar

[5] B. Hefia, A. Oulhadj, et al. Detection and measurement of surface cracks in ferromagnetic materials using eddy current testing. NDT&E International 39 (2006) 384-390.

DOI: 10.1016/j.ndteint.2005.11.004

Google Scholar

[6] Daniel J. Sadler, Chong H. Ahn. On-chip eddy current sensor for proximity sensing and crack detection. Sensor and Actuator A 91 (2001) 340-345.

DOI: 10.1016/s0924-4247(01)00605-7

Google Scholar

[7] K.H. Kim, J. Lee, N. Kim, D. Jang, Y.H. Kim, J. Kim, Nondestructive testing for metallic flaws using inductive coil sensor with circular typed single loop excitation coil, Phys. Stat. Sol. A 204 (12) (2007) 4083-4086.

DOI: 10.1002/pssa.200777288

Google Scholar

[8] Yu-Jung Cha, Baekil Nam, Jongryoul Kim, et al. Evaluation of the planar inductive magnetic field sensors for metallic crack detections, Sensors and Actuators A 162 (2010) 13-19.

DOI: 10.1016/j.sna.2010.06.003

Google Scholar

[9] MALEKA C K, SAILE V. Applications of LIGA technology to precision manufacturing of high aspect ratio micro-components and systems: a review[J]. Microelectronics Journal, 2004, 35: 131-143.

DOI: 10.1016/j.mejo.2003.10.003

Google Scholar

[10] H. Lorenz, M. Despont, N. Fahrni, J. Brugger, P. Vettiger, and P. Renaud, High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS, Sensors Actuators A, vol. 70, pp.33-39, (1998).

DOI: 10.1016/s0924-4247(98)80055-1

Google Scholar