Size Effect on Pull-In Behaviors of Electrostatically Actuated Cantilever Micro-Beams

Abstract:

For the deformation problem of an electrostatically actuated cantilever micro-beam, size effect on pull-in behaviors of the micro-beams have been studied based on modified couple stress theory. The approximate analytical solutions to the pull-in voltage and pull-in displacement of the micro-beam are derived by using the Rayleigh-Ritz method. The results show that the normalized pull-in voltage of the cantilever micro-beam is size-dependent and the normalized pull-in displacement of the micro-beam is size independence.

• Periodical: Applied Mechanics and Materials (Volumes 300-301)
• Pages: 889-892
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.300-301.889
• Online since: February 2013
• Authors: Sheng Li Kong
• Keywords: Couple Stress, Pull-In, Size Effect, Trial Function

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