Simulation of MEMS Cantilever Biosensor and Analysis of Readout Methods for Tuberculosis Detection

Abstract:

This paper deals with designing a MEMS cantilever which can function as biosensor for tuberculosis detection. In this study we investigate the MEMS based biosensor to detect Tuberculosis based on capacitive sensing, peizoresistive and resonant frequency methods. We also examine which method has enhanced performance. Early detection and treatment of diseases can facilitated only if we are able to detect pathogenic and physiologically relevant molecules in the body with high sensitivity and specificity.Early detection of diseases reduce the risk of patients being pushed to advanced stages of many diseases.This sensor is used for early detection of Tuberculosis using the antigen antibody reaction.Tuberculosis can be detected by monitoring the presence of disease causing antigen in the blood stream.The presence of disease causing antigen in the blood can be monitered by using this microcantilever based diagnostic device. The sensing principle varies according to the device, the nature of the analyte molecules, and the precision required. Capacitance, piezoresistance and resonance frequency are among the read out methods depending upon the mechanical properties of the device. The biosensor structure is designed and simulated using Coventorware, Intellisuit and HFSS software. This microcantilever based biosensor can detect tuberculosis by immobilizing specific antibodies on the microcantilever.These antibodies are specific to TB antigen 85 complex.When the patient sample containing TB antigen 85 complex is placed on the cantilever biomolecular interactions take place between TB antigens and the antibodies immobilized on the upper surface of the microcantilever.This causes microcantilever to bend and facilitates to detect the presence of Tuberculosis.Bending of the cantilever can be measured by capacitive sensing, peizoresistive and resonant frequency shift methods.

• Periodical: Applied Mechanics and Materials (Volume 376)
• Pages: 428-433
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.376.428
• Online since: August 2013
• Authors: P. Sangeetha, A. Vimala Juliet
• Keywords: Biosensor, Cantilever, MEMS

References

[1] Fritz, J. et al., 2000, 'Translating Bimolecular Recognition Nanomechanics, ', Science, 288, . 316–318.

[2] Raiteri, R. et al., 1999, 'Sensing of Biological Substances Based on the Bending of Micro fabricated Cantilevers, ', Sens. Actuators B, 61, p.213–217.

[3] Chui, B. et al., 1998, 'Independent Detection of Vertical and Lateral Forces With a Sidewall-Implanted Dual-Axis Piezoresistive Cantilever, ', Appl. Phys. Lett., 72(11)p.1388–1390.

DOI: 10.1063/1.121064

[4] Tortonese, M., Barrett, R., and Quate, C., 1993, 'Atomic Resolution With an Atomic Force Microscope Using Piezoresistive Detection, ', Appl. Phys. Lett., 62(8) p.834–836.

DOI: 10.1063/1.108593

[5] Gaucher, P. et al., 1998, 'Piezoelectric Bimorph Cantilever for Actuation and Sensing Applications, ', J. Phys. IV, 8, p.235–238.

[6] Minne, S., Manalis, S., and Quate, C., 1995, 'Parallel Atomic Force Microscopy Using Cantilevers With Integrated Piezoresistive Sensors and Integrated Piezoelectric Actuators, ', Appl. Phys. Lett., 67(26) p.3918–3920.

DOI: 10.1063/1.115317

[7] Huang, Q., and Lee, N., 2000, 'A Simple Approach to Characterizing the Driving Force of Polysilicon Laterally Driven Thermal Microactuators, ', Sens. Actuators, A, A80 (3) p.267–272.

DOI: 10.1016/s0924-4247(99)00252-6

[8] Attia, P. et al., 1998, 'Fabrication and Characterization of Electrostatically Driven Silicon Microbeams, ', Microelectron. J., 29, p.641–44.

[9] Shiba, Y. et al., 1998, 'Capacitive Afm Probe for High Speed Imaging, ', Trans. of the IEE of Japan, 118E (12) pp.647-50.

[10] G.G. Stoney, The tension of metallic film deposited by electrolysis, Proceedings of Royal Society of London. Series A, vol. 82, pp.172-175, (1909).

[11] Mohd. Zahid Ansari and Chongdu Cho, Design and Analysis of a high sensitive Microcantilever Biosensor for Biomedical Applications, Proceedings of the IEEE, 2008 International Conference on BioMedical Engineering and Informatics, pp.593-597.

DOI: 10.1109/bmei.2008.308

[12] Don Klaitabtim and Adisorn Tuantranont, Design consideration and Finite Element Modeling of MEMS Cantilever for Nano-Biosensor Applications, IEEE conference on Nanotectnology, Nagoya, Japan, July (2005).

DOI: 10.1109/nano.2005.1500758

[13] H. Zhang and E. Kim, Micromachined acoustic resonant mass sensor, Journal of Microelectromechanical Systems (MEMS), vol. 14, p.699–706, August (2005).

DOI: 10.1109/jmems.2005.845405

[14] Ziegler, C., 2004. Cantilever-based biosensors, Anal. Bioanal. Chem., 379: 946-959.

[15] Madou, M. J, 2008. Fundamentals of microfabrication, 2nd ed. CRC Press, Florida.