Three-Degree-of-Freedom Dynamic Model Based IT2RFNN Control for Gantry Position Stage

Po Huan Chou; Faa Jeng Lin; Chin Sheng Chen; Feng Chi Lee

doi:10.4028/www.scientific.net/AMM.416-417.554

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 416-417Three-Degree-of-Freedom Dynamic Model Based...

Three-Degree-of-Freedom Dynamic Model Based IT2RFNN Control for Gantry Position Stage

Abstract:

A three-degree-of-freedom (3-DOF) dynamic model based interval type-2 recurrent fuzzy neural network (IT2RFNN) control system is proposed in this study for a gantry position stage. To consider the effect of inter-axis mechanical coupling, a Lagrangian equation based 3-DOF dynamic model for gantry position stage is derived first. Then, to minimize the synchronous error and tracking error of the gantry position stage, the 3-DOF dynamic model based IT2RFNN control system is proposed. In this approach, the adaptive learning algorithms of the IT2RFNN on-line are derived from the Lyapunov stability theorem. Finally, some experimental results of optical inspection application are illustrated to show the validity of the proposed control approach.

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Periodical:

Applied Mechanics and Materials (Volumes 416-417)

Pages:

554-558

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.416-417.554

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Online since:

September 2013

Authors:

Po Huan Chou, Faa Jeng Lin, Chin Sheng Chen, Feng Chi Lee

Keywords:

Gantry Position Stage, Lagrangian Equation

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