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Deposition of High Quality (Ti,Al)N Hard Coatings by Computer Automation Ion Plating

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Abstract:

The mechanical properties of (Ti,Al)N hard coatings deposited by computer automation ion plating (CAIP) have been investigated. The results indicate that the (Ti,Al)N coatings with the thickness 27.3μm and 19.5μm were successfully directly deposited on the substrate through changing bias voltage during deposition. The mechanical properties of the coatings with large thickness are excellent: the adhesion of film/substrate is higher, the residual stress is lower, and wear resistance is better.

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Periodical:

Applied Mechanics and Materials (Volume 432)

Pages:

82-85

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.432.82

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Online since:

September 2013

Authors:

Sheng Sheng Zhao, Wen Chang Lang, Rong Ming Yan

Keywords:

(Ti,Al)N, Computer Automation Ion Plating, Deposition, Hard Coatings, Large Thickness

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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