Outer Conductor Inner Diameter Measuring System of Coaxial Transmission Line

Abstract:

In this paper, an outer conductor diameter measuring system for coaxial transmission lines are introduced. The structure of pole-distance changing cylinder capacitor sensor probe aperture measuring is analyzed. The signal analysis and control system of the whole measurement system is introduced in detail. The guarding ring technology is used to eliminate edge effect of effective measuring sensor electrode. The operation amplifying transform circuit is used to overcome the nonlinear problem of pole-distance changing sensor. Driving cable technology is adopted to reduce the influence of parasitic capacitance. Through the CCD image centering and grating encoder driven by stepping motor drive system and encoder system X, Y, Z axis precision positioning, in order to realize the long hole in any section of the nanomeasuring diameter; The measuring types of this system is: Φ 0.8 mm, Φ 1 mm, Φ 1.8 mm to Φ 7 mm hole diameter. The resolution is 5nm--20nm, the standard deviation of repeated measurement is 0.05μm--0.1μm. The measurement uncertainty is 2μm0.2μm.

• Periodical: Applied Mechanics and Materials (Volume 440)
• Pages: 147-152
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.440.147
• Online since: October 2013
• Authors: Hong Yu Ye, Yi Zhong Zheng*
• Keywords: Automatic Control Model, Capacitive Sensing, CCD Image Centering, Inner Diameter of Long Hole, Nano-Measurement, Signal Processing

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