Structural State and Mechanical Characteristics of the ZrN Films Prepared by Sputtering

Chien Cheng Liu; Kuang I Liu; Yung Chih Chou; Yung Mao Cheng; Chih Lung Lin

doi:10.4028/www.scientific.net/AMM.440.9

Paper Titles

Preface and Organizing Committee

Comparison of Effective Thermal Conductivity of Hollow Fibers by Prediction Models and FE Method
p.3

Structural State and Mechanical Characteristics of the ZrN Films Prepared by Sputtering
p.9

Rheological Fluids for Energy Absorbing Systems
p.13

Preparation and Characterization of Poly(lactic acid) with Different Molecular Weights by Thermal Hydrolysis
p.19

Influence of Stark Effect and Quantum Wells Thickness on Optical Properties of InGaN Laser Diodes
p.25

Stepwise Inhibition Effect of Multinitroxyl Radicals on Styrene Polymerization
p.31

Experimental Investigation of Nano-Composite Coated Stainless Steel (316L) Surfaces under Unidirectional Sliding
p.37

Comparison of Machinability of Glass/Jute Fabric Polymer Composites
p.42

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 440Structural State and Mechanical Characteristics of...

Structural State and Mechanical Characteristics of the ZrN Films Prepared by Sputtering

Abstract:

ZrN films were prepared by magnetron sputtering on die steel substrates. The objective of this study was to investigate the effect of nitrogen flow rate on the microstructure ,morphology, nanohardness properties determined by X-ray diffraction, field-emission scanning electron microscope, nanoindentation, and pin-on-disk, respectively. The XRD shows that ZrN has (111) and (200) preferred orientation under lower nitrogen flow rates. The surface of coatings revealed smaller grains and uniform dense under lower nitrogen flow rates. With increasing the nitrogen flow rates, this result showed ZrN films lead to poor mechanical properties and hardness values. However, films consisted of up high ernitrogen flow rate had much lower friction coefficient.

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Periodical:

Applied Mechanics and Materials (Volume 440)

Pages:

9-12

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.440.9

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Online since:

October 2013

Authors:

Chien Cheng Liu*, Kuang I Liu, Yung Chih Chou, Yung Mao Cheng, Chih Lung Lin

Keywords:

Film, Friction Coefficient (FC), Magnetron Sputtering, Zirconium Nitrogen

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