MEMS-Based Gas Chromatography Column for the Analysis of Chemical Warfare Agent (CWA) Simulates

Yi Li; Xiao Song Du; Yang Wang; Hui Ling Tai; Dong Qiu; Qing Hao Lin; Ya Dong Jiang

doi:10.4028/www.scientific.net/AMM.475-476.1294

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 475-476MEMS-Based Gas Chromatography Column for the...

MEMS-Based Gas Chromatography Column for the Analysis of Chemical Warfare Agent (CWA) Simulates

Abstract:

In this report the gas chromatography column was fabricated base on micro electro mechanical system (MEMS) technology. It tries to find an equilibrium point which can fast detect CWA stimulants with efficient column separation. Under deep reactive-ion etching (DRIE) process, a 1m length, 90 um thickness and 300 um height which form 3:1high-aspect-ratio, MEMS-based silicon GC column was fabricated. The GC column was coated with 95%Methyl 5% Phenyl Polysilozane (DB-5) as the stationary phase. Dimethyl methyl phosphonate (DMMP), Triethyl phosphate (TEP) and Methy salicylate were used for CWA simulations. All of these three samples can be separated less than 90s with reasonable column efficiency.

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Periodical:

Applied Mechanics and Materials (Volumes 475-476)

Pages:

1294-1298

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.475-476.1294

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Online since:

December 2013

Authors:

Yi Li, Xiao Song Du*, Yang Wang, Hui Ling Tai, Dong Qiu, Qing Hao Lin, Ya Dong Jiang

Keywords:

CWA, Gas Chromatography, MEMS, Simulation

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* - Corresponding Author

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