Researching Influence of IBAD PLD Parameters on Properties of Nanocrystalline ZnO Thin Films

Oleg Alexeevich Ageev; Dmitriy Anatolievich Golosov; Evgeny Genadievich Zamburg; Alexandr Michailovich Alexeev; Zakhar Evgenievich Vakulov; Daniil Evgenievich Vakulov; Alexandr Vladimirovich Shumov; Michael Nikolaevich Ivonin

doi:10.4028/www.scientific.net/AMM.481.55

Paper Titles

Synchrotron XANES Spectra of Superparamagnetic Iron Oxides Synthesized by Ultrasonic-Assisted Co-Precipitation
p.36

Analysis of Tunneling Phenomenon and Electron Confinement in Quantum Nanowire
p.40

Effect of Post Annealing Temperature on Cerium Doped ZnO Nanostructures
p.45

Investigate Mechanical Behavior of Gold Nanowire with Defect
p.49

Researching Influence of IBAD PLD Parameters on Properties of Nanocrystalline ZnO Thin Films
p.55

Influence of Polymer Additive on Synthesis of ZnO Nanoparticle by Precipitation Method
p.60

Preparation of ZnO Nanosol Dispersed in Aqueous Medium and its Dispersion Characteristics
p.66

Effect of CO₂ Flow Rate on the Synthesis Nanosized Precipitated Calcium Carbonate, PCC
p.72

Characteristics of Lead-Free Machinable Brass of Powder Metallurgycu-40 Mass%Zn/1.0 Mass% mg with Graphite Particles
p.79

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 481Researching Influence of IBAD PLD Parameters on...

Researching Influence of IBAD PLD Parameters on Properties of Nanocrystalline ZnO Thin Films

Abstract:

Nanocrystalline ZnO thin films were manufactured by Ion Beam Assisted Pulsed Laser Deposition (IBAD PLD). The influence of technological parameters and parameters of ion assisted deposition on structural, morphological and electrical parameters of ZnO thin films were researched in the experiments. As a result it was determined that changes in the basic technological parameters of IBAD PLD (target-substrate distance, substrate temperature, energy density of the laser pulses, annealing temperature, Ar flow) are able to change properties of the thin films significant, including surface roughness in the range from 0.75±0.20 nm to 7.8±2.2 nm, resistivity in the range from 10^-3Ohm cm to 10⁴ Ohm cm. The possibility of controlling the morphological and physical properties of ZnO nanocrystalline films obtained in the experiments has been shown.

You might also be interested in these eBooks

Quantum, Nano, Micro Technologies and Applied Researches

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volume 481)

Pages:

55-59

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.481.55

Citation:

Cite this paper

Online since:

December 2013

Authors:

Oleg Alexeevich Ageev*, Dmitriy Anatolievich Golosov, Evgeny Genadievich Zamburg, Alexandr Michailovich Alexeev, Zakhar Evgenievich Vakulov, Daniil Evgenievich Vakulov, Alexandr Vladimirovich Shumov, Michael Nikolaevich Ivonin

Keywords:

Ion Beam Assisted Deposition, Nanocrystalline Thin Films, Nanomaterial, Nanotechnology, Pulsed Laser Deposition, ZNO

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] HadisMorkoç, ÜmitÖzgür: Zinc Oxide Nanostructures: Zinc Oxide Fundamentals, Materials and Device Technology, edtied by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, NY (2009).

Google Scholar

[2] Honghai Zhang, XinhuaPan and PingDing: Optics Communications Vol. 301-302 (2013), p.96 – 99.

Google Scholar

[3] M.A. Reshchikov, A. El-Shaer, A. Behrends, A. Bakin, A. Waag: Physica B: Condensed Matter, Vol. 404 (2009), p.4813 – 4815.

DOI: 10.1016/j.physb.2009.08.173

Google Scholar

[4] The-Long Phan, S.C. Yu, R. Vincent, N.H. Dan, W.S. Shi: Journal of Luminescence. Vol. 130 (2010), p.1142 – 1146.

Google Scholar

[5] B.D. Ngoma, O. Sakho, N. Manyala, J.B. Kana, N. Mlungisi, L. Guerbous, A.Y. Fasasi, M. Maaza, A.C. Beye: Applied Surface Science. Vol. 255. (2009), p.7314–7318.

DOI: 10.1016/j.apsusc.2009.03.089

Google Scholar

[6] A. Og. Dikovska, N.N. Nedyalkov, P.A. Atanasov: Materials Science and Engineering: B. Vol. 176. (2011), p.1548–1551.

Google Scholar

[7] Supab Choopuna, Hitoshi Tabata, Tomoji Kawai: Journal of Crystal Growth. Vol. 274, (2005), pp.167-172.

Google Scholar

[8] Kazuomi Kakimoto, Yasuhiro Iijima, Takashi Saitoh: Physica C Vol. 392 – 396. (2003), pp.783-789.

Google Scholar

[9] Vakulov D.Е., Zamburg E.G.: Mater. IX annual scientific conference of students and base departments PhDs of the Southern Scientific Centre RAS. (2013), p.134.

Google Scholar