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Pattern Formation of Silicon Oxide Thin Film with InkMask

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Abstract:

Patterned silicon oxide films were formed by a simple process using a dimethyl-silicone-oil as source and inks as patterning masks.After the coating of the ink, the dimethyl-silicone-oil was coated onto the substrate. The sample was heated at 150oC and ozone gas was irradiated. After the heat treatment with ozone gas, patterned silicon film was formed. The circle pattern with a diameter of 20 μm wassuccessfully formed.After the formation of the patterned silicon oxide film, the silicon oxide was hardly observed at the position where the ink coated.

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Periodical:

Applied Mechanics and Materials (Volume 481)

Pages:

98-101

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.481.98

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Online since:

December 2013

Authors:

Takuya Ito*, Yasuyuki Ota, Kensuke Nishioka

Keywords:

Ink, Ozone, Pattern Formation, Silicon Oxide

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] H. G. Craighead, Science, 290, 1532 (2000).

Google Scholar

[2] H. Wu, T. W. Odom, D. T. Chiu and G. M. Whitesides, J. Am. Chem. Soc., 125, 554 (2003).

Google Scholar

[3] T. Ito, T. Matumoto, and K. Nishioka, Surface & Coatings Technology 215 (2013) 447.

Google Scholar

[4] J. V. Michael, J. Chem. Phys. 54 (1971) 4455.

Google Scholar

[5] T. Kawahara, A. Yuuki, and Y. Matsui, Jpn. J. Appl. Phy. 31 (1992) 2625.

Google Scholar

[6] M. Matsuura, Y. Hayashide, H. Kotani, and H. Abe, Jpn. J. Appl. Phys. 30 (1991) 1530.

Google Scholar

[7] S. Horita, K. Toriyabe and K. Nishioka, Japanese Journal of Applied Physics 48 (2009) 035502.

Google Scholar

[8] G. Lucovsky, M. J. Manitini, J. K. Srivastava, and E. A. Irene, J. Vac. Sci. Technol. B, 5 (1987) 153.

Google Scholar

[9] M. Adachi, K. Okuyama, N. Tohge, M. Shimada, J. Sato, and M. Muroyama, Jpn. J. Appl. Phy., 32 (1993) 748.

Google Scholar

[10] B. Havlınova, D. Babiakova, V. Brezova, M. Durovic, M. Novotna, F. Belanyi, Dyes and Pigments 54 (2002) 173.

Google Scholar

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