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Effect of the Mechanical Properties and Geometric Parameters on the Crack Density of a Multi-Layered Thin Film Structure under Residual Tensile Stress

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Abstract:

The effect of the mechanical properties and geometric parameters on the crack density of a multi-layered thin film structure under residual tensile stress is investigated theoretically. The numerical results show that the crack density of the thin film decreases with the increase of the thickness of the thin film and (or) the fracture strength of the thin film. These results can help us more deeply understand the fracture behavior of the multi-layered thin film structure under residual tensile stress.

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Info:

Periodical:

Applied Mechanics and Materials (Volumes 543-547)

Pages:

1533-1536

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.543-547.1533

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Cite this paper

Online since:

March 2014

Authors:

Ban Quan Yang*, Xue Jun Chen, Wei Hai Sun, Hong Qian Chen, Jing Wen Pan, Ying Chen

Keywords:

Crack Density, Mechanical Property, Multi-Layered Thin Film Structure, Residual Stress

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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