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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 556-562A Low-Cost Low-Power Capacitive Humidity Sensor in...

A Low-Cost Low-Power Capacitive Humidity Sensor in CMOS Technology

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Abstract:

This paper presents a capacitive humidity sensor in CMOS technology. The humidity sensor element is implemented in standard CMOS technology without any further post-processing, which results in low fabrication cost. The sensor interface is based on a delta-sigma converter and can be easily reconfigured to compensate for process variation of the sensing element. The proposed humidity sensor is fabricated in 0.16μm standard CMOS process and the chip occupies 0.25mm². The measurement result shows that this humidity sensor acquires a resolution of 0.1%RH in the range of 20%RH to 90%RH. The interface achieves a 12.5-bits capacitance-to-digital conversion and consumes only 9.6μW power at 1.2V supply voltage.

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Periodical:

Applied Mechanics and Materials (Volumes 556-562)

Pages:

1842-1846

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.556-562.1842

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Online since:

May 2014

Authors:

Fang Ming Deng*, Yi Gang He

Keywords:

Capacitive Humidity Sensor, CMOS Technology, Delta-Sigma Interface

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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* - Corresponding Author

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