Development of a Gas Flow Sensor Based on FS5 Hot-Film Probe

Lei Yang; Jia Qiang Yang

doi:10.4028/www.scientific.net/AMM.568-570.537

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 568-570Development of a Gas Flow Sensor Based on FS5...

Development of a Gas Flow Sensor Based on FS5 Hot-Film Probe

Abstract:

On the basis of thermal measuring method, a hot-film gas flow sensor is proposed. Its sensitive element is a FS5 probe, which is integrated with measuring resistance and temperature compensating resistance inside. In order to achieve temperature compensation, the main measuring circuit is designed. Considering minimizing errors in this circuit, the temperature correcting circuit is added to further modify output voltage. By fitting measurement data of gas flow and the final output voltage with least square method, an operating characteristic curve is obtained as well as its 4th order polynomial. Under equivalent conditions, the proposed sensor, a high-precision standard sensor and an industrial sensor are experimented upon and the contrast analysis of their measurement results is given. The experimental results prove that the proposed sensor has high precision with measurement error less than 3%. Therefore the proposed sensor is feasible for industrial applications.

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Periodical:

Applied Mechanics and Materials (Volumes 568-570)

Pages:

537-541

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.568-570.537

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Online since:

June 2014

Authors:

Lei Yang, Jia Qiang Yang*

Keywords:

Gas Flow Sensor, Hot-Film Probe, Measurement, Temperature Compensation

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* - Corresponding Author

References

[1] G. Liang, W. Cai: Flow Measurement Technology and Meter (China Machine Press , China 2002), p.350.

Google Scholar

[2] Q. Teng, B. Ma , K. Xu : Chinese Journal of Scientific Instrument, Vol. 29 (2008) No. 3, p.477.

Google Scholar

[3] Q. Zhou, R. Haag, L. Wang: Essential How Measurement Principles and Applications (National Defence Industry Press, China 2008), p.174.

Google Scholar

[4] Y. Shi, X. He, X. Gao, et al: Micronanoelectronic Technology, Vol. 50 (2013) No. 7, p.434.

Google Scholar

[5] B. Yu, R. Wang, H. Gong, et al: Chinese Journal of Sensors and Actuators, Vol. 24 (2011) No. 5, p.684.

Google Scholar

[6] F. Shen, C. Wang, Y. Ceng, et al: China Science and Technology Information, (2011) No. 12, p.97.

Google Scholar

[7] G. Liang, F. Wang, C. Li, et al: Journal of China JiLiang University, Vol. 17 (2006) No. 1, p.36.

Google Scholar

[8] W. Zhao, Z. Song, Z. Huang, et al: Chinese Journal of Scientific Instrument, Vol. 30(2009) No. 5, p.1073.

Google Scholar

[9] Y. Liang, G. Liang and Y. Wang: Journal of China JiLiang University, Vol. 18 (2007) No. 3, p.191.

Google Scholar

[10] W. Zhao, Z. Song and Z. Huang: Chinese Journal of Sensors and Actuators, Vol. 22 (2009), No. 3, p.442.

Google Scholar