Digital Moiré Phase-Shifting Interferometric Technique for Aspheric Testing

Qun Hao; Yao Hu; Qiu Dong Zhu

doi:10.4028/www.scientific.net/AMM.590.623

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 590Digital Moiré Phase-Shifting Interferometric...

Digital Moiré Phase-Shifting Interferometric Technique for Aspheric Testing

Abstract:

Faster and more accurate optical aspheric testing methods are required in many technical fields. A digital moiré phase shifting interferometer (DMPSI) with partial compensation lens (PCL) is proposed. With digital phase shifting technique, only one shot of interferogram is required, so the system structure is simpler with lower sensitivity to the environmental vibration. PCL is designed to enlarge the measurement range of asphericity. A DMPSI prototype in Fizeau configuration has been developed. After calibration, spherical surface is tested with accuracy comparable to Zygo interferometer.

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Periodical:

Applied Mechanics and Materials (Volume 590)

Pages:

623-628

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.590.623

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Online since:

June 2014

Authors:

Qun Hao*, Yao Hu, Qiu Dong Zhu

Keywords:

Aspherics, Interferometry, Moiré Techniques, Optical Inspection, Phase Measurement

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* - Corresponding Author

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