Design Optimization and Finite Element Analysis of 3C-SiC Bio-Sensors Based on Dogbone Resonator

Abstract:

This paper presents the optimized design and Finite Element Analysis (FEA) of a bio sensor based on cubic silicon carbide (3C-SiC) for pathogen detection. Silicon Carbide is chosen due to its excellent material properties and chemical stability compared to silicon in varying environmental conditions. The desired resonance frequency is optimized using matlab and the finite element analysis is carried out using COMSOL and Intellisuite software’s. The effect of the residual stress on the desired mode of resonant frequency and the fabrication feasibility of the proposed resonator fabrication are studied using FEA analysis. The mathematical modeling of thermally actuation and piezoresistive sensing for the design resonator bio sensors are illuminated. The close agreement between the analytical model and finite element analysis verify the design of proposed bio sensors.

• Periodical: Applied Mechanics and Materials (Volume 595)
• Pages: 221-227
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.595.221
• Online since: July 2014
• Authors: Abid Iqbal*, Faisal Mohd-Yasin, Sima Dimitrijev
• Keywords: 3C-SiC, Dogbone Resonator, Extreme Environment, Pathogens, Piezoresistive, Si

References

[1] E. Noel du Toit, L.W. Brian and K. Sang-Gook, Design considerations for MEMS-scale piezoelectric mechanical vibration energy harvesters, Integrated Ferroelectrics, vol71, pp.121-160.

DOI: 10.1080/10584580590964574

[2] S. P. Beeby, M. J. Tudor and N. M. White, Energy harvesting vibration sources for microsystems applications., Meas. Sci. Technol. 2006; 17: R175-R195.

DOI: 10.1088/0957-0233/17/12/r01

[3] S. Roundy, PK Wright, A Piezoelectric vibration basedgenerator for wireless electronics, Smart Mater. Struct., vol: 13, pp.1131-1142, (2004).

DOI: 10.1088/0964-1726/13/5/018

[4] F. Hua-Bin, L Jing-Quan, X Zheng-Yi, Lu D, W . Li and C . Di, Fabrication and performances of MEMS-based piezoelectric power generator for vibration energy harvesting, Microelectronics Journal., vol: 37, pp: 1280-1284, (2006).

DOI: 10.1088/0256-307x/23/3/057

[5] L. Jing-Quan, F. Hua-Bin, Xu. Zheng-Yi, M. Xin-Hui, Xiu-Cheng and Di Chen, A MEMS-based piezoelectric powergenerator array for vibration energy harvesting., Microelectronics Journal, vol: 39, pp.802-806, (2008).

[6] S. Dongna, P. Jung-Hyun, A . Jyoti, C. Song-Yul, C. W. Howard, K. Dong-Joo, The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting., J. Micromech. Microeng., vol: 18, p.055017, (2008).

DOI: 10.1088/0960-1317/18/5/055017

[7] Fang Hua-Bin, Liu Jing-Quan, XuZheng-Yi, L. Dong, D. Chen and Cai Bing-Chu, A MEMS-based piezoelectric powergenerator for low frequency vibration energy harvesting., Chinese Phys. Lett., vol: 23, p.732, (2006).

DOI: 10.1088/0256-307x/23/3/057

[8] T. H. Lee, S Bhunia and M. Mehregany, Electromechanical computing at 500C with Silicon Carbide, Science, vol: 329, pp: 1316-1318, (2010).

DOI: 10.1126/science.1192511

[9] A. H. Epstein, Millimeter-scale, Micro-ElectroMechanical Systems gas turbine engines, ASME journal of Engineering for Gas Turbines and Power, vol: 126(2), pp: 204-226, (2006).

DOI: 10.1115/1.1739245

[10] G.W. Hunter, P.G. Neudeck and J. Xu, Developed of SiC-based gas sensors foraerospace applications, Material Research Society Symposium Proceeding, vol. 815, (2004).

[11] PM Sarro, Silicon Carbide as a new MEMS technology, Sensors and Actuators, vol: 82, pp: 210-218, (2008).

DOI: 10.1016/s0924-4247(99)00335-0

[12] J.M.R. Kudimi, F. Mohd-Yasin and S. Dimitrijev (2012), SiC-Based Piezoelectric Energy Harvester for Extreme Environment, 26th European Conference on Solid State Transducers, (Eurosensor XXVI), (2012).

DOI: 10.1016/j.proeng.2012.09.359