Research of the Determination of Thin Film Optical Constants by Using the Simulated Annealing Algorithm
Simulated annealing algorithm is a mathematic model, which imitates the physical process of annealing. And optical thin film is widely used in many industry, To perform the functions for which they were designed, the films must have proper thickness, roughness and other characteristics. In the paper, the simulated annealing algorithm is used to determine the film optical constant It uses the transmission data through thin film over a range of wavelengths to calculate the thickness. According to the experimental results, the solution found by simulated annealing algorithm is unique and correct.
W. L. Wang and X. H. Rong, "Research of the Determination of Thin Film Optical Constants by Using the Simulated Annealing Algorithm", Applied Mechanics and Materials, Vols. 66-68, pp. 9-13, 2011