Stiffness Detection of Silicon Arm Based on Micro-Loading Method

Xu Song Quan; Xin Jin; Zhi Jing Zhang; Yang Yu; Liang Ma

doi:10.4028/www.scientific.net/AMM.670-671.1290

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 670-671Stiffness Detection of Silicon Arm Based on...

Stiffness Detection of Silicon Arm Based on Micro-Loading Method

Abstract:

A micro-loading stiffness detection method for micro-miniature components with brittle and complicated structure has been proposed to achieve stiffness detection of silicon arm. This paper adopts the methord of combing finite element analysis and micro-loading experiment together. Finally, the paper analyzed the deviation of silicon arm’s stiffness values obtained by simulation and experiment, and comparatively analyzed the variation tendency of silicon arm’s stiffness value among different claws. Result shows: the silicon arm’s stiffness value and the stiffness variation tendency obtained by experiment agrees well with it which is obtained by simulation. It proves the stiffness detection method is reliable and rational to achieve the stiffness detection of silicon arm.

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Periodical:

Applied Mechanics and Materials (Volumes 670-671)

Pages:

1290-1295

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.670-671.1290

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Online since:

October 2014

Authors:

Xu Song Quan*, Xin Jin, Zhi Jing Zhang, Yang Yu, Liang Ma

Keywords:

Finite Element Analysis (FEA), Micro-Loading Method, Silicon Arm, Stiffness Detection

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