Vibration Analysis of Silicon Microgyroscope Based on Simulink

Abstract:

To improve the anti-vibration capability of silicon mcrogyroscope, making it works well under the vibration environment, this paper analyzes the dual-mass silicon mcrogyroscope and did the following works. First of all, the operating principle, analysis parameters of silicon microgyroscope and the vibration condition are introduced. Secondly, this paper proposes a vibration analysis method base on the signal conversion between time domain and frequency domain and establishes a Simulink demodulation model according to circuits of silicon microgyroscope. Finally, we get the conclusion that under the condition of vibration, composition with the same frequency of Vds in Vsense signal is the main influence factor of bias stability by analyzing experimental data. This has a great significance for improving the anti-vibration capability and guiding the interior structure design of silicon microgyroscope.

• Periodical: Applied Mechanics and Materials (Volumes 670-671)
• Pages: 1310-1314
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.670-671.1310
• Online since: October 2014
• Authors: Wei Feng Tang*, An Ping Qiu, Guo Ming Xia, Yan Su
• Keywords: Anti-Vibration, Bias Stability, Silicon Microgyroscope, Vibration Analysis

References

[1] Jun Liu, Yunbo Shi, Jie Li: submitted to Journal of Micro-inertial Technology. (2005).

[2] Qin Shi: Study on Key Technologies of Silicon Microgyroscopes for Improving Performance[D]. 2005. (in Chinses).

[3] Anping Qiu, Qin Shi, Yan Su: China ZL200710133223. 5[P]. 2008-03-05. (in Chinses).

[4] Jinming Li: Research on High Signal-Noise Ratio of Capacitive Micromechanical Gyroscope[D]. 2005, 29-31. (in Chinese).

[5] Shaodong Jiang, Anping Qiu, Qin Shi, Yan Su: submitted to Opt. Precision Eng. 2013, 21(1) (in Chinses).

[6] IEEE Std 528-2001. IEEE Standard for Inertial Sensor Terminology[S]. New York: The Institute of Electrical and Electronics Engineer Inc. (2001).