Analysis and Experimental Verification on Bias Drift of Silicon Microgyroscope

Abstract:

There is a bias drift of silicon microgyroscope when power on which limits its application in higher precision field. This paper analyzes and validates the main cause of bias drift, combined with theoretical analysis of demodulation and experimental results, which has a great significance for improving the performance of silicon microgyroscope. First of all, operating principle of silicon microgyroscope is introduced and theoretical analysis on bias drift is made on the basis of DC output voltage of microgyroscope. Secondly, demodulated signals’ amplitude and phase are analyzed in Matlab with the experimental data. By contrasting theoretical and experimental bias drift, the accuracy of theoretical formula is verified. It turns out that, the relative error of bias drift from 2-hours value to stable value is 5.5%, it’s 6.6% for 1-hour value to stable value and for beginning it’s just 1.7%. Experimental results agrees well with the theoretical analysis, which verifies that the main cause of bias drift of silicon microgyroscope is the phase difference between Vds and Vsense. This conclusion can provide some guidance for structure design optimization and circuits improving.

• Periodical: Applied Mechanics and Materials (Volumes 670-671)
• Pages: 1305-1309
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.670-671.1305
• Online since: October 2014
• Authors: Wei Feng Tang*, An Ping Qiu, Guo Ming Xia, Yan Su
• Keywords: Bias Drift, MATLAB, Phase Difference, Silicon Microgyroscope

References

[1] Ancheng Zhang, Xiaoping Hu: submitted to Journal of Chinese Inertial Technology. 2013, 21(6).

[2] Anping Qiu, Qin Shi, Yan Su: China ZL200710133223. 5[P]. 2008-03-05. (in Chinses).

[3] Jinming Li: Research on High Signal-Noise Ratio of Capacitive Micromechanical gyroscope[D]. 2005, pp.29-31. (in Chinses).

[4] Shengrong Fu: The study on interface circuit of vibratory microgyroscope droven by electromagnetic[D]. 2003, p.67. (in Chinese).

[5] Shaodong Jiang, Anping Qiu, Qin Shi, Yan Su: submitted to Opt. Precision Eng. 2013, 21(1) (in Chinses).

[6] YongXin Li: Signal and dynamic measurement system[M]. 2009, pp.173-175. (in Chinses).