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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 687-691Analysis and Experiment on the Response...

Analysis and Experiment on the Response Characteristics of a Pneumatic Micro Actuator Based on TBC Model

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Abstract:

Using basic physical arguments, we present a design and method for the fabrication of a pneumatic micro PDMS actuator using multilayer soft lithography based on dry-film photoresist. Its novel structure consists of a three-way electromagnetic microvalve for gas flow control which is connected with gas inlet microchannel for the actuator. Then the whole system is considered as a throttle blind capacitor (TBC) model and it is used to predict the response time of the pneumatic actuator by correlating its characteristics such as gas pressurizing, air resistance and membrane deformation. For this micro actuator, upward deformation motions of actuated area are observed of actuated area under 100KPa (N₂) pressure and the fast open response (~ 15 ms) was achieved at 50KPa pressure. Our method provides a simple, cheap and save-time pneumatic micro actuator which can be used in active functions, such as valves, pumps and mixers integrated on pneumatic microfluidic chips for downsizing the driving pressure and improving the whole efficiency of microchips.

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Periodical:

Applied Mechanics and Materials (Volumes 687-691)

Pages:

336-344

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.687-691.336

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Online since:

November 2014

Authors:

Xu Ling Liu*, Song Jing Li

Keywords:

Dry-Film Photoresist, PDMS Membrane, Pneumatic Micro Actuator, Response Time, TBC Model

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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