PEN Film Surface Development Using High-Frequency - Low Pressure Plasma Chemical Vapor Deposition System

Peerapong Nuchuay; Nuttee Thungsuk; Tanapoj Chaikeeree; Toshifumi Yuji; Nat Kasayapan; Narong Mungkung

doi:10.4028/www.scientific.net/AMM.704.58

Paper Titles

Study of the Milling Process for Thin Components Using a Flexible Setup Configuration
p.27

Development and Evaluation of Mechanical Properties of Al/Ilmenite Nanocomposite
p.32

The Effect of Induced Vibration on Thermoplastic Composite System
p.39

Experimental Research on Performance of Electrochemical Machining Process on Hard Material (Carbon Steel EN9) and Soft Material (Copper)
p.48

PEN Film Surface Development Using High-Frequency - Low Pressure Plasma Chemical Vapor Deposition System
p.58

Prediction of Spherical Phase Change Material Temperature Using RBFNN Model
p.63

Wear Behavior in Wire of Wire Cut EDM
p.70

Estimation of Thermal Effect of Ground Moisture Condensation on Heat Transfer outside Geothermal Borehole
p.79

Specifics of Mathematical Simulation and the Method of Modeling for Subway Tunnels Thermal Conditions
p.85

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 704PEN Film Surface Development Using High-Frequency...

PEN Film Surface Development Using High-Frequency - Low Pressure Plasma Chemical Vapor Deposition System

Abstract:

Solar cell converts sunlight into electricity with no moving parts and environmental friendly. Although silicon based solar cell is currently more efficient, the dye-sensitized solar cell is considerably cheaper to manufacture because of its low cost materials and simplicity process of fabrication. In this paper, the development of plasma formed equipment for thin film material on flexible solar cell using low-pressure high frequency Plasma Chemical Vapor Deposition method on the surface of Polyethylene naphthalate (PEN) with the mixture of Ar gas and N₂ gas is presented. The results indicate that using this method can be possible for surface modification.

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Periodical:

Applied Mechanics and Materials (Volume 704)

Pages:

58-62

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.704.58

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Online since:

December 2014

Authors:

Peerapong Nuchuay, Nuttee Thungsuk, Tanapoj Chaikeeree, Toshifumi Yuji, Nat Kasayapan, Narong Mungkung

Keywords:

Argon Gas, Nitrogen Gas, Polyethylene Naphthalate, Surface Development, Thin Film

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References

[1] J.O. Barnes, D.J. Leary, A.G. Gardon, J. Electrochem. Soc. 127 (1980) 1636.

Google Scholar

[2] T. Ohgaki, N. Ohashi, H. Kakemoto, S. Wada, Y. Adachi, H. Haneda, T. Tsurumi, J. Appl. Phys. 93 (2003) (1961).

Google Scholar

[3] K. Soderstrom, F. -J. Haug, J. Escarre, C. Pahud, R. Biron, C. Ballif, Solar Energy Materials & Solar Cells 95 (2011) 3585–3591.

DOI: 10.1016/j.solmat.2011.09.016

Google Scholar

[4] B. Tang, G. Hu, H. Gao, Z. Shi, Journal of Power Sources 234 (2013) 60e68.

Google Scholar

[5] Y.J. Chen, Y.S. Lo, C.H. Huangb, Y.C. Cai, M.C. Hsu, Materials Chemistry and Physics 120 (2010) 181–186.

Google Scholar

[6] J. Chen, T. Peng, K. Fan, R. Li, J. Xia, Electrochimica Acta 94 (2013) 1– 6.

Google Scholar

[7] K. Moriwaki, M. Nomoto, S. Yuuya, N. Murakami, T. Ohgoh, K. Yamane, S. Ishizuka, Shigeru Niki, Solar Energy Materials & Solar Cells 112 (2013) 106–111.

DOI: 10.1016/j.solmat.2013.01.016

Google Scholar

[8] M. Günthner, M. Pscherer, C. Kaufmann, G. Motz, Solar Energy Materials & Solar Cells 123 (2014) 97–103.

DOI: 10.1016/j.solmat.2014.01.027

Google Scholar

[9] T. Sakamoto, H. Matsuura, and H. Akatsuka, Jpn. J. Appl. Phys., vol. 45, no. 10A, p.7905, (2006).

Google Scholar

[10] T. Kimura, K. Akatsuka, and K. Ohe, J. Phys. D., vol. 27, no. 8, p.1664, (1994).

Google Scholar

[11] S. P. Brühl, M. W. Russell, B. J. Gómez, G. M. Grigioni, J. N. Feugeas, and A. Ricard, J. Phys. D., vol. 30, p.2917, (1997).

Google Scholar

[12] I. Blaszczyk-Lezak, A. M. Wrobel, T. Aoki, Y. Nakanishi, I. Kucinska, and A. Tracz, Thin Solid Films, vol. 497, no. 1-2, p.24, (2001).

DOI: 10.1016/j.tsf.2005.09.192

Google Scholar

[13] C. Yi, H. U. Kim, and S.W. Rhee, J. Electrochem. Soc., vol. 148, no. 10, p. C679, (2001).

Google Scholar