Influence Study of Sheet Resistance Measurement Errors by Square Four Probes

Xin Fu Liu; Zhi Hui Zhu

doi:10.4028/www.scientific.net/AMM.734.125

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 734Influence Study of Sheet Resistance Measurement...

Influence Study of Sheet Resistance Measurement Errors by Square Four Probes

Abstract:

The article analyses the principle of square four probe measurement technology. The principle of the probe vacillated at testing a large silicon wafer is analyzed, and interference can be avoided while measuring and analyzing the impact on square four probe measurement by probe vacillate. The influence of probe wavering using square four probe method for the equipment designed by authors is analyzed with detailed data, and calculated error of the probe wander. Probe positions of maximum error produced are found, so ensuring testing accuracy schemes are proposed at last.

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Periodical:

Applied Mechanics and Materials (Volume 734)

Pages:

125-128

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.734.125

Citation:

Cite this paper

Online since:

February 2015

Authors:

Xin Fu Liu*, Zhi Hui Zhu

Keywords:

Four Probe Measurement Technology, Sheet Resistance, Square Four Probe Equipment

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* - Corresponding Author

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