Characterization of MEMS Materials Using Laser Micromachine

Shazlina Johari; Mazlee Mazalan; Yuvahraj Sridaran; Siti Rohaida Ahmad

doi:10.4028/www.scientific.net/AMM.754-755.612

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 754-755Characterization of MEMS Materials Using Laser...

Characterization of MEMS Materials Using Laser Micromachine

Abstract:

Laser micromachining technique was used in this work to produce two different microfluidic structure on three MEMS materials namely silicon, SU-8 photoresist and polydimethylsiloxane (PDMS). The operational parameters of the machine ablation effects on the materials, which are the laser energy, laser pulse rate and the laser size were also investigated. We found that this technique is capable to produce typical MEMS structure similar as being produced using conventional photolithography process.

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Periodical:

Applied Mechanics and Materials (Volumes 754-755)

Pages:

612-616

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.754-755.612

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Online since:

April 2015

Authors:

Shazlina Johari*, Mazlee Mazalan, Yuvahraj Sridaran, Siti Rohaida Ahmad

Keywords:

Laser Micromachine, PDMS, Silicon, SU-8

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References

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