Characterization of the Electrically-Actuated Micro Circular Plate

Chin Chia Liu; Chuang Chin Yang

doi:10.4028/www.scientific.net/AMM.764-765.671

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 764-765Characterization of the Electrically-Actuated...

Characterization of the Electrically-Actuated Micro Circular Plate

Abstract:

In this study presents a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation technique to analyze the nonlinear dynamic response of the micro circular plate. The analysis takes account of the axial residual stress and hydrostatic pressure acting on micro circular plate upper surface. The effects of the residual stress, initial gap height, and thickness on the pull-in voltage of the micro circular plate are systematically explored. Overall, the proposed method provides an accurate and versatile means of analyzing the complex nonlinear behavior of the electrostatically-actuated microstructures.

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Periodical:

Applied Mechanics and Materials (Volumes 764-765)

Pages:

671-674

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.764-765.671

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Online since:

May 2015

Authors:

Chin Chia Liu*, Chuang Chin Yang

Keywords:

Differential Transformation, Electrostatic Actuator, Micro Circular Plate, Residual Stress

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References

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