Fabrication and Properties Study of the Dielectric Membranes Used as Constructive Basis for Sensitive Elements of Gas Sensors

Denis Veselov

doi:10.4028/www.scientific.net/AMM.799-800.994

Paper Titles

The Design of Axial Force Loading Detection System of Surface Drive Unit
p.976

A Calibration Device and Method to Calibrate the Beam’s Direction of the Point Laser Probe
p.980

Multi-Fault Diagnosis of Rotating Machinery Based on Spatially Constrained ICA
p.985

Application of a Compensation Inspection Method in Geodynamic Monitoring
p.989

Fabrication and Properties Study of the Dielectric Membranes Used as Constructive Basis for Sensitive Elements of Gas Sensors
p.994

Development of Simulator for Intelligent Autonomous Underwater Vehicle
p.1001

Design a Transformable Wheel for Enhancing Mobility of 4-Wheeled Mobile Robot
p.1006

Design a New Worm-Type Mechanism of Mobile Robot Applicable in Colonoscopy
p.1011

Dexterity Measure for a 2-DOF Revolute Spherical Serial Manipulator
p.1016

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 799-800Fabrication and Properties Study of the Dielectric...

Fabrication and Properties Study of the Dielectric Membranes Used as Constructive Basis for Sensitive Elements of Gas Sensors

Abstract:

The article presents the properties study results of the dielectric membranes for sensitive elements of semiconductor gas sensors, obtained by different modes of the reactive magnetron sputtering of silicon with application of the two-stage unilateral anisotropic etching of silicon in the organic alkaline solutions. The qualitative analysis of the membranes stability to destructions and deformations in the course of their fabrication and heating is given. Optimum structures and modes of films formation for dielectric membrane structures are determined. The admissible thickness of the thermal silicon oxide underlay, which is does not promote to considerable membranes deformations in the course of their fabrication and heating, is identified.

You might also be interested in these eBooks

Mechanical and Electrical Technology VII

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 799-800)

Pages:

994-997

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.799-800.994

Citation:

Cite this paper

Online since:

October 2015

Authors:

Denis Veselov*

Keywords:

Dielectric Film, Dielectric Membrane, Membrane Structure, Sensitive Element

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] G. Sakai, N.S. Baik, N. Miura, N. Yamazoe, Gas sensing properties of tin oxide thin films fabricated from hydrothermally treated nanoparticles, Sens. Actuators B 77 (2001) 116–121.

DOI: 10.1016/s0925-4005(01)00682-7

Google Scholar

[2] M. Heule, L.J. Gauckler, Miniaturised arrays of tin oxide gas sensors on single microhotplate substrates fabricated by micromolding in capillaries. Sens. Actuators B 93 (2003) 100-106.

DOI: 10.1016/s0925-4005(03)00243-0

Google Scholar

[3] A.A. Vasiliev, S. Yu. Gogish-Klushin, D. Yu. Kharitonov, Gas sensors with thin membranes of nanocrystalline alumina as sensing elements, Sens. & Syst. J. 10 (2006) 4-8.

Google Scholar

[4] D.S. Veselov, Yu.A. Voronov, S.A. Voronov and L.K. Orlova, R.F. Patent 2, 449, 412 (2010).

Google Scholar

[5] D.S. Veselov, Yu. A. Voronov, S.A. Voronov, Technology for the production of dielectric membrane structures for integrated gas sensitive sensors, Sens. & Syst. J. 7 (2011) 38-42.

Google Scholar

[6] D.S. Veselov, Yu. A. Voronov, S.A. Voronov, Sorption gas sensors based on a dielectric membrane construction, Nucl. Ph. & Eng. J. 1 (2013) 10-16.

Google Scholar