Development and Practicality of a Scanning Point Autofocus Instrument for High Speed Areal Surface Texture Measurement

Katsuhiro Miura; Atsuko Nose; Hirofumi Suzuki; Mutsumi Okada

doi:10.4028/www.scientific.net/AMR.1017.675

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1017Development and Practicality of a Scanning Point...

Development and Practicality of a Scanning Point Autofocus Instrument for High Speed Areal Surface Texture Measurement

Abstract:

A point autofocus instrument (PAI) is widely used for the roughness and contour measurement of various precision processing surfaces, because it is capable of measuring a large area in high precision. The only disadvantage of PAI is to require a long measurement time. Its conventional index measurement stops the scanning stage in order to obtain each coordinate value of the fixed sampling pitch. Hence, it was necessary to develop a scanning point autofocus instrument (SPAI) which can obtain coordinate values while the scanning stage is moving. As an achievement of the development, the SPAI offers 26 times faster measurement speed than that of the index measurement with equivalent accuracy. The SPAI easily measures 3D surface texture and provides quantitative evaluations of the precision processing surfaces.

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Periodical:

Advanced Materials Research (Volume 1017)

Pages:

675-680

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1017.675

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Online since:

September 2014

Authors:

Katsuhiro Miura*, Atsuko Nose, Hirofumi Suzuki, Mutsumi Okada

Keywords:

Areal Surface Texture, Aspherical Lens, Point Autofocus Probe, Roughness, Ultra-Precision Processing

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References

[1] Richard Leach, Optical Measurement of Surface Topography, pp.107-129.

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[2] ISO 25178-605: 2014, Nominal characteristics of non-contact (point autofocus probe) instruments, Annex A, General principles.

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[3] ISO 25178-3: 2012, Specification operators, 4 Complete specification operator.

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[4] ISO 25178-605: 2014 Nominal characteristics of non-contact (point autofocus probe) instruments, Annex D, Features of an areal surface texture measuring instrument.

DOI: 10.3403/30205377

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