Research on the Application of USM in the Ultra Precision Stage

Hai Bo Lin; Guo Zhe Yang

doi:10.4028/www.scientific.net/AMR.102-104.529

Paper Titles

Structure Analysis on Gantry Machining Center and Characteristic Analysis of Rolling Guide Interface
p.511

Constitutive Relationship of TA15 Alloy and its Application in the Hammer Forging Process Simulation
p.516

Effects of Ultrasonic Vibration on Machining Accuracy in Drilling
p.521

Experimental Study on Wear Mechanism of Cutting Tool and Cutting Temperature in High Speed Machining Superalloy
p.525

Research on the Application of USM in the Ultra Precision Stage
p.529

Research on the Error Model of a Nanometer Precision Stage
p.534

NC Reconstruction of High Accuracy Spheres Grinding
p.539

Tool Path Generation Method of Equal Approximation Error for Free-Form Surface in High Speed Machining
p.544

Overview of Rapid Prototyping for Fabrication of Bone Tissue Engineering Scaffold
p.550

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 102-104Research on the Application of USM in the Ultra...

Research on the Application of USM in the Ultra Precision Stage

Abstract:

A nanometer precision location stage for micro-EDM was designed, which was built by the using of ultrasonic motor as driver unit. The stage precision test was done then. The results showed that the stage worked well and reached high precision. The research provided a new solution about the design of precision location stages.

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Periodical:

Advanced Materials Research (Volumes 102-104)

Pages:

529-533

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.102-104.529

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Online since:

March 2010

Authors:

Hai Bo Lin, Guo Zhe Yang

Keywords:

Micro-EDM, Precision Location Stage, Ultrasonic Motor

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