Research on the Application of USM in the Ultra Precision Stage

Abstract:

Article Preview

A nanometer precision location stage for micro-EDM was designed, which was built by the using of ultrasonic motor as driver unit. The stage precision test was done then. The results showed that the stage worked well and reached high precision. The research provided a new solution about the design of precision location stages.

Info:

Periodical:

Advanced Materials Research (Volumes 102-104)

Edited by:

Guozhong Chai, Congda Lu and Donghui Wen

Pages:

529-533

DOI:

10.4028/www.scientific.net/AMR.102-104.529

Citation:

H. B. Lin and G. Z. Yang, "Research on the Application of USM in the Ultra Precision Stage", Advanced Materials Research, Vols. 102-104, pp. 529-533, 2010

Online since:

March 2010

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Price:

$35.00

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