Research on the Application of USM in the Ultra Precision Stage
A nanometer precision location stage for micro-EDM was designed, which was built by the using of ultrasonic motor as driver unit. The stage precision test was done then. The results showed that the stage worked well and reached high precision. The research provided a new solution about the design of precision location stages.
Guozhong Chai, Congda Lu and Donghui Wen
H. B. Lin and G. Z. Yang, "Research on the Application of USM in the Ultra Precision Stage", Advanced Materials Research, Vols. 102-104, pp. 529-533, 2010