Research on the Error Model of a Nanometer Precision Stage
The paper based on the domestic research result and foreign research result on error compensation, aimed at the geometric feature of a three dimensions micro-EDM stage. By the coordinate matrix transformation method, we have developed the three dimension kinematics synthesis error mathematical model. Then the micro-EDM stage error was compensated. The error model for the stage is simple and error compensation is easy.
Guozhong Chai, Congda Lu and Donghui Wen
G. Z. Yang et al., "Research on the Error Model of a Nanometer Precision Stage", Advanced Materials Research, Vols. 102-104, pp. 534-538, 2010