Research on the Error Model of a Nanometer Precision Stage

Abstract:

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The paper based on the domestic research result and foreign research result on error compensation, aimed at the geometric feature of a three dimensions micro-EDM stage. By the coordinate matrix transformation method, we have developed the three dimension kinematics synthesis error mathematical model. Then the micro-EDM stage error was compensated. The error model for the stage is simple and error compensation is easy.

Info:

Periodical:

Advanced Materials Research (Volumes 102-104)

Edited by:

Guozhong Chai, Congda Lu and Donghui Wen

Pages:

534-538

DOI:

10.4028/www.scientific.net/AMR.102-104.534

Citation:

G. Z. Yang et al., "Research on the Error Model of a Nanometer Precision Stage", Advanced Materials Research, Vols. 102-104, pp. 534-538, 2010

Online since:

March 2010

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Price:

$35.00

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