Research on the Error Model of a Nanometer Precision Stage

Guo Zhe Yang; Hai Bo Lin; Feng Liu

doi:10.4028/www.scientific.net/AMR.102-104.534

Paper Titles

Constitutive Relationship of TA15 Alloy and its Application in the Hammer Forging Process Simulation
p.516

Effects of Ultrasonic Vibration on Machining Accuracy in Drilling
p.521

Experimental Study on Wear Mechanism of Cutting Tool and Cutting Temperature in High Speed Machining Superalloy
p.525

Research on the Application of USM in the Ultra Precision Stage
p.529

Research on the Error Model of a Nanometer Precision Stage
p.534

NC Reconstruction of High Accuracy Spheres Grinding
p.539

Tool Path Generation Method of Equal Approximation Error for Free-Form Surface in High Speed Machining
p.544

Overview of Rapid Prototyping for Fabrication of Bone Tissue Engineering Scaffold
p.550

Uniformity of Kinematic Trajectory with Wafer Driving Initiatively in Plane Lapping Process
p.555

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 102-104Research on the Error Model of a Nanometer...

Research on the Error Model of a Nanometer Precision Stage

Abstract:

The paper based on the domestic research result and foreign research result on error compensation, aimed at the geometric feature of a three dimensions micro-EDM stage. By the coordinate matrix transformation method, we have developed the three dimension kinematics synthesis error mathematical model. Then the micro-EDM stage error was compensated. The error model for the stage is simple and error compensation is easy.