Design and Test of Piezoelectric Tool Actuator on Ultra-Precision Machine Tool for KDP Crystals

Chao Zhang; Fei Hu Zhang; Qiang Zhang

doi:10.4028/www.scientific.net/AMR.1027.16

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1027Design and Test of Piezoelectric Tool Actuator on...

Design and Test of Piezoelectric Tool Actuator on Ultra-Precision Machine Tool for KDP Crystals

Abstract:

In order to improve the positioning resolution of the tool adapter on ultra-precision machine tool for KDP crystals, this paper presents a new piezo tool actuator. First, a new flexible membrane structure is designed after considering the characteristics of the machine tool for KDP crystals. Then, its detailed structural dimension is determined by finite element method. Finally, the piezo tool actuator is machined based on designs and its performance data is obtained by experiments. Experimental results indicate that its positioning resolution is superior to 0.5μm and its stroke reaches 4.7μm, which can meet the requirements of ultra-precision machine tool for KDP crystals.

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Periodical:

Advanced Materials Research (Volume 1027)

Pages:

16-19

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1027.16

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Online since:

October 2014

Authors:

Chao Zhang, Fei Hu Zhang*, Qiang Zhang

Keywords:

KDP, Piezoelectric Actuator, Ultra-Precision Machine Tool

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* - Corresponding Author

References

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