Study on Polishing Technology for Hard-Brittle Materials by a Micro Abrasive Water Jet

Zeng Wen Liu; R.Y. Liu

doi:10.4028/www.scientific.net/AMR.1027.52

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The Pressure Field Radiated by Cavitation Bubble in the Grinding Area of Power Ultrasonic Honing
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Study on Grinding Force of High Volume Fraction SiCp/Al Composites with Rotary Ultrasonic Vibration Grinding
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Study on Polishing Technology for Hard-Brittle Materials by a Micro Abrasive Water Jet
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Study on Process Parameters in CMP Ultra-Thin Stainless Steel Sheet
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The Finite Element Analysis for Ultra-Precision Single-Plane Lapping Machine Bed
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Lapping and Polishing of Sapphire Wafer with Fixed Abrasive Pad
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Machining Mechanism of Fresnel Lens Mold
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1027Study on Polishing Technology for Hard-Brittle...

Study on Polishing Technology for Hard-Brittle Materials by a Micro Abrasive Water Jet

Abstract:

s: Abrasive jet micromachining is considered as a promising precision processing technology for brittle materials such as silicate glass and silicon nitride that are increasingly used in various applications. In this study, some polishing experiments are conducted for hard-brittle materials by a micro slurry jet. The results show that the morphology and the integrity of the material surface are improved greatly after polishing. The average roughness (Ra) value of the silicate glass decrease from 2.32μm to 0.35μm and the average roughness (Ra) value of the Si₃N₄ decrease from 2.63μm to 0.34μm. The material removal mechanism and the surface formation mechanism are studied. The factors to influence the surface morphology, the surface quality and the surface roughness are analyzed in order to take measures to improve the surface quality and reduce the surface roughness value.

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Periodical:

Advanced Materials Research (Volume 1027)

Pages:

52-57

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1027.52

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Online since:

October 2014

Authors:

Zeng Wen Liu*, R.Y. Liu

Keywords:

Mechanism, Morpholoy, Polishing Technology, Roughness, Slurry Jet

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