The Influence of Sputtering Power on the Structural, Morphological and Optical Properties of ZnSe Thin Films Deposited by R.F Magnetron Sputtering

Abstract:

By creatively using R.F Magnetic sputtering technique , we have successfully prepared ZnSe polycrystalline thin films on glass substrates..The effect of different sputtering powers on the structural, morphological and optical properties of the as-deposited films were studied. The films were characterized by using X-ray diffraction, UV-VIS spectrometer ,scanning electrical microscope ,etc. The results indicate that :Under the pressure of o.8pa,with the diverse sputtering power varying from 60w to 100w,the intensities of XRD peaks of ZnSe thin films varied apparently ,while the morphological properties were almost the same. It should be noted here that the crystallinity of the ZnSe film, which was deposited with the power of 90W, showed a face-centered cubic phase. Besides, it showed relatively better performance: with strong [111] orientation ,smooth surface without obvious defects, comparatively large band gap and high transmission rate.

• Periodical: Advanced Materials Research (Volume 1058)
• Pages: 240-243
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1058.240
• Online since: November 2014
• Authors: Yan Zheng, Qian Liang, Bing Li, Guang Gen Zeng, Wen Wu Wang, Jing Quan Zhang, Wei Li, Liang Huan Feng
• Keywords: SEM, Solar Cells, XRD, ZnSe Thin Films

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