Properties of Films Characterized by Scanning Acoustic Microscope

Hong Juan Yan; Chun Guang Xu; Ding Guo Xiao; Qi Lin

doi:10.4028/www.scientific.net/AMR.1061-1062.961

Paper Titles

Study on Prediction of Chaotic Time Series Using Least Squares Support Vector Machines
p.935

Manipulator Tactile Telepresence Research Based on one Type Pressure-Sensitive Sensor
p.939

Design of Multi Parameter Water Quality Online Monitoring System Base on FPGA
p.945

Expert System Based on Fuzzy Rules for Monitoring and Diagnosis of Operation Conditions in Rotating Machines
p.950

Properties of Films Characterized by Scanning Acoustic Microscope
p.961

Research on the Secondary Compensation Method of the Screw Pitch Error Based on the Laser Interferometer
p.966

Study on Calibration and Test of Automotive Wheel Hub Detection System
p.970

A Skywave OTHR Adaptive Frequency Selection Method Based on Preliminary Criterion and Weighted Criterion
p.974

A Water-Solution Fluorescence Probe for H₂O₂ Based on Naphthalimide Derivative
p.978

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 1061-1062Properties of Films Characterized by Scanning...

Properties of Films Characterized by Scanning Acoustic Microscope

Abstract:

The scanning acoustic microscope is used to detect the properties of films. The ultrasonic wave propagates in the films with thickness h, acoustic impedance Z₂ between medium with acoustic impedance Z₁. The echoes from upper and lower interfaces overlap and interfere. The echoes are transformed by FFT. The interference phenomena are observed in amplitude spectrum of echoes. The spectrum has periodic extreme values at f_n, f_n=nc/2h. When thickness h is known, sound velocity c₂ of film can be calculated. According to the principle, the properties of films such as thickness, acoustic impendence and elastic modulus are evaluated by scanning acoustic microscopy. The experimental results are good accorded with the actual properties of specimens.

You might also be interested in these eBooks

Research in Materials and Manufacturing Technologies IV

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 1061-1062)

Pages:

961-965

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1061-1062.961

Citation:

Cite this paper

Online since:

December 2014

Authors:

Hong Juan Yan, Chun Guang Xu*, Ding Guo Xiao, Qi Lin

Keywords:

Acoustic Impendence, Amplitude Spectrum, Elastic Modulus, Film, Scanning Acoustic Microscopy, Thickness

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] B.R. Tittmann, C. Miyasaka, C. Ishiyama, I. K. Park: AIP Conference Proceedings, Vol. 1430(2012), pp.793-797.

Google Scholar

[2] Zhongzhu Liu, Chunguang Xu and Xinyu Zhao: Advanced Materials Research, Vol. 468-471(2012), pp.1128-1131.

Google Scholar

[3] Lin Li, Li Xi-meng, and Zhao Yang: Physical Testing and Chemical Analysis Part A: Physical Testing, Vol. 44(2008), pp.180-183.

Google Scholar

[4] A. I. Lavrentyev, and S. I Rokhlin.: Ultrasonics, Vol. 39(2001), pp.211-221.

Google Scholar

[5] Tomoya Sunaga, Hironori Tohmyoh, and Manabu Suzuki: Thin Solid Films, Vol. 544(2013) , p.437–442.

DOI: 10.1016/j.tsf.2013.02.085

Google Scholar

[6] N. F. Haines, J. C. Bell, and P. J. McIntyre: Journal of the Acoustical Society of America, Vol. 64(1978), pp.1645-1651.

Google Scholar

[7] Zheng Rui, Lawrence H Le, Mauricio D Sacchi, and Dean Ta：Physics in Medicine and Biology, Vol. 52(2007), pp.5855-5869.

Google Scholar

[8] Hongjuan Yan, Kai Peng, Chunguang Xu, and Qi Lin: Far East Forum on Nondestructive Evaluation/Testing: New Technology and Application (FENDT), 2013, pp.141-144.

DOI: 10.1109/fendt50467.2020.9337530

Google Scholar

[9] N. Nakamura, T. Nakashima, S. Oura, H. Ogi, and M. Hirao: Ultrasonics, Vol. 50(2010), p.150–154.

Google Scholar

[10] J. L. Rose. Cambridge University Press, (1999).

Google Scholar

[11] V. Kniazev. Ultrasonics, Vol. 66(2011), pp.31-35.

Google Scholar

[12] Ruth Thomas, Bruce W. Drinkwater, and Dimosthenis Liaptsis: Acoustical Society of America, Vol. 117(2005), pp.638-645.

Google Scholar

[13] Salmiah Kasolanga, and R.S. Dwyer Joyce: Sensors and Actuators, Vol. 203(2013), pp.386-393.

Google Scholar

[14] RS Mills, EY Avan, and RS Dwyer-Joyce: Journal of Engineering Tribology, Vol. 277(2013), pp.100-111.

Google Scholar

[15] Matthew J. Banet, Martin Fuchs, and John A. Rogers, et al: Applied Physics Letters, Vol. 73(1998), pp.169-171.

Google Scholar

[16] CONG Sen, and GANG Tie: Transactions of Nonferrous Metals Society of China, Vol. 22(2012), pp.323-328.

Google Scholar