Magnetron Sputtering Preparation of Diamond-Like Carbon Film Adhesion Characteristics Research

De Shan Wang; Qi Liang Li

doi:10.4028/www.scientific.net/AMR.1079-1080.28

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 1079-1080Magnetron Sputtering Preparation of Diamond-Like...

Magnetron Sputtering Preparation of Diamond-Like Carbon Film Adhesion Characteristics Research

Abstract:

Using vacuum magnetron sputtering, preparation of diamond-like carbon film by middle transition layer of Ti, TiN and TiAlN, Ti/TiN/TiAlN in preparing multilayer structure of DLC carbon film on stainless steel substrates, research among different coating material of DLC carbon membrane structure, appearance, hardness, the influence of the interface bonding strength and wear resistance, the film contains some carbon chain structure sp3 hybridized carbon content in the highest and the excellent comprehensive mechanical properties of the material of the middle layer. Experimental studies find that Ti/TiN/TiAlN as transition layer DLC carbon film performance is good, obvious anti stripping adhesion properties, can reduce the diamond-like coating system caused by thermal expansion mismatch stress, using Ti/TiN/TiAlN transition layer of the interface bonding strength of the most outstanding in the middle.

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Periodical:

Advanced Materials Research (Volumes 1079-1080)

Pages:

28-32

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1079-1080.28

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Online since:

December 2014

Authors:

De Shan Wang*, Qi Liang Li

Keywords:

Adhesion, Diamond-Like Carbon (DLC) Film, Magnetron Sputtering

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* - Corresponding Author

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