The Effect of N Doping Amount on Zn/N-Codoped Composite Films by Vacuum Deposition

Shu Juan Zhang; Ming Sheng Li; Yi Duo; Shu Qiang Zeng

doi:10.4028/www.scientific.net/AMR.1094.234

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1094The Effect of N Doping Amount on Zn/N-Codoped...

The Effect of N Doping Amount on Zn/N-Codoped Composite Films by Vacuum Deposition

Abstract:

The Zn/N co-doped composite thin films were deposited on medical glass slide by synthesis technique of arc ion plating and magnetron sputtering. The influence of N doping amount, annealing treatment on films properties were investigated. Film structure, surface morphologies and optical properties were measured with XRD, SEM and UV-VIS transmittance spectroscope. The results show that the absorption edges of the composite films increasing with the rising N doping amount. The greatest absorption edges of the composite films can reach 550nm, but the transmittance decreasing with the N doping amount increasing obviously. The absorption edge of the films decreased in different degree after annealing treatment. The annealing treatment reduces the absorption edge and decreases the N doping amount of Zn/N-codoped composite. The crystal structure changed obviously after annealing treatment, the crystal structure were most ZnTiO3 before annealing treatment, The ZnTiO3 diffraction peak decreases with increasing the N doping amount, the film surface grain changed significantly after annealing treatment, which is corresponding to the XRD result, the crystal particle got further crystallization.