Structure and Electrical Properties of Highly (100)-Oriented Ba(Zr0.05Ti0.95)O3 Films Prepared by Chemical Solution Deposition

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A chemical solution deposition process for preparation of highly (100)-oriented Ba(Zr0.05Ti0.95)O3 films was developed. The orientation degree of Ba(Zr0.05Ti0.95)O3 thin films prepared by this process can reach up to 99.1%. The electrical properties of the (100)-oriented films prepared by this process have been studied. The Ba(Zr0.05Ti0.95)O3 films with a thickness of about 270 nm show a dielectric constant of ∼740 and a loss tangent of ∼3%. The remanent polarization (2Pr) and coercive field (2Ec) are 3.2 μC/cm2 and 34 kV/cm, respectively.

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Periodical:

Advanced Materials Research (Volumes 11-12)

Main Theme:

Edited by:

Masayuki Nogami, Riguang Jin, Toshihiro Kasuga and Wantai Yang

Pages:

101-104

DOI:

10.4028/www.scientific.net/AMR.11-12.101

Citation:

Y. P. Guo et al., "Structure and Electrical Properties of Highly (100)-Oriented Ba(Zr0.05Ti0.95)O3 Films Prepared by Chemical Solution Deposition", Advanced Materials Research, Vols. 11-12, pp. 101-104, 2006

Online since:

February 2006

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$35.00

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