Effects of Solvent on the Phase Composition and Microstructure of ZrSiO₄ Film

Abstract:

Zirconium silicate thin film was prepared via a novel non-hydrolytic sol-gel (NHSG) process at low temperature using zirconium tetrachloride (ZrCl₄) and tetraethoxysilane (TEOS) as precursors. The phase composition and the microstructure of samples were characterized by X-ray diffraction analysis (XRD) and scanning electron microscopy (SEM), respectively. The results demonstrate that pure ZrSiO₄ film can be synthesized by using ethanol and isopropanol as solvent rather than dimethyl formamide (DMF) and dimethyl nylon acid (DBE) which cause impurity ZrO₂. However, only ethanol can achieved smooth and dense ZrSiO₄ film. The viscosity results suggest that the sol with ethanol has great stability. With a pulling rate of 1.0 mm s^-1, a high quality ZrSiO₄ film was prepared after drying at 50 ^oC for 2 h and calcination at 850 °C with a heating rate of 1.0 °C min^-1.

• Periodical: Advanced Materials Research (Volume 1104)
• Pages: 119-124
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1104.119
• Online since: May 2015
• Authors: Fang Cao, Ting Chen, Wei Hui Jiang, Jian Min Liu, Jian Rui Zha, Qian Wu
• Keywords: Dense, Film, Non-Hydrolytic Sol-Gel Process, ZrSiO₄

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