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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1109Fabrication of Nanostructure-Based Copper Oxide...

Fabrication of Nanostructure-Based Copper Oxide Biosensor

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Abstract:

The purpose of this paper is to give a review of the fabrication of nanostructure-based copper oxide biosensor. This paper briefly covers processes from silicon wafer cleaning, oxidation process, silicon nitride deposition, aluminum metal deposition, pattern transfer, copper oxide sol-gel preparation and coating and lastly IV testing with the results expected from the completed device.Keywords: Nanostruture, copper oxide, biosensor, sol-gel, current-voltage testing.

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Periodical:

Advanced Materials Research (Volume 1109)

Pages:

376-380

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1109.376

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Online since:

June 2015

Authors:

M. Safwan Azmi*, Sharipah Nadzirah, Uda Hashim

Keywords:

Biosensor, Copper Oxide, Current-Voltage Testing, Nanostruture, Sol-Gel

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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