Morphological Characterization of Fabricated Aluminum Interdigitated Electrodes on Silicon Substrate

M. Safwan Azmi; Sharipah Nadzirah; Uda Hashim

doi:10.4028/www.scientific.net/AMR.1109.381

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1109Morphological Characterization of Fabricated...

Morphological Characterization of Fabricated Aluminum Interdigitated Electrodes on Silicon Substrate

Abstract:

The purpose of this paper is to study the morphological characterization of aluminum interdigitated electrodes (IDE) of different gap sizes on silicon substrate. The electrodes were fabricated using standard photolithography process and were done so with sizes of 12 μm, 10 μm and 7 μm. The electrodes were morphologically characterized using scanning electron microscope (SEM) and high-powered microscope (HPM).Keywords: morphological, interdigitated electrodes, aluminum

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Periodical:

Advanced Materials Research (Volume 1109)

Pages:

381-384

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1109.381

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Online since:

June 2015

Authors:

M. Safwan Azmi*, Sharipah Nadzirah, Uda Hashim

Keywords:

Aluminum (Al), Interdigitated Electrodes, Morphological

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