Investigation on the Dynamic Behaviour of an Ultrasonic-Levitation Magnetic Guiding System

Article Preview

Abstract:

Guiding systems for precision manufacturing machines have to fulfil high demands. Low compliance and the absence of friction is required to achieve a high production accuracy. This article presents a novel active guiding system based on the combination of ultrasonic levitation and magnetic actuators. Firstly, the combined actuator and its working principles are described. Subsequently, the concept for an active, frictionless and medium-free guiding system is outlined. In addition to the free degree of freedom (DOF) in guiding direction, the other 5 DOF are adjustable in order to improve the guides positioning accuracy. The experimental validation of the concept is conducted with a simplified prototype, acting as a 3 DOF adjustable planar guide. Finally, measured compliance frequency responses demonstrate the performance of this novel active guiding concept.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

377-383

Citation:

Online since:

August 2016

Export:

Share:

Citation:

* - Corresponding Author

[1] O. Riemer, Advances in ultraprecision manufacturing, Procedings Japan Society for Precision Engineering (2011).

Google Scholar

[2] F. Wardle, Ultra precision bearings, Cambridge, Woodhead Publishing, (2015).

Google Scholar

[3] D. Dornfeld, D. -E. Lee, Precision manufacturing, New York, Springer, (2008).

Google Scholar

[4] M. Weck, Werkzeugmaschinen - Konstruktion und Berechnung, Berlin, Springer, (2002).

Google Scholar

[5] S. -K. Ro, S. Kim, Y. Kwak, C. H. Park, A linear air bearing stage with active magnetic preloads for ultraprecise straight motion, CIRP-CAT 2007 34 (2010), no. 1, p.186–194.

DOI: 10.1016/j.precisioneng.2009.06.010

Google Scholar

[6] Y. Altintas, A. Verl, C. Brecher, L. Uriarte, G. Pritschow, Machine tool feed drives, CIRP Annals - Manufacturing Technology 60 (2011), no. 2, p.779–796.

DOI: 10.1016/j.cirp.2011.05.010

Google Scholar

[7] F. Hackelöer, Erweiterung der Einsatzmöglichkeiten von Magnetführungen, Garbsen, PZH-Verlag, (2014).

Google Scholar

[8] B. Denkena, D. Dahlmann, R. Krueger, Electromagnetic Levitation Guide for Use in Ultra-Precision Milling Centres, Procedia CIRP 37 (2015), p.199–204.

DOI: 10.1016/j.procir.2015.08.008

Google Scholar

[9] S. Mojrzisch, F. Hackelöer, H. -C. Möhring, B. Denkena, J. Wallaschek, Führung, Patent DE102011015973B4, (2013).

Google Scholar

[10] S. Mojrzisch, I. Ille, J. Wallaschek, B. Denkena, A hybrid ultrasonic squeeze film and magnetic levitation actuator for machine guideways, 2013 IEEE International Ultrasonics Symposium (IUS), 2013, p.485–487.

DOI: 10.1109/ultsym.2013.0126

Google Scholar

[11] I. Ille, J. Twiefel, Model-based Feedback Control of an Ultrasonic Transducer for Ultrasonic Assisted Turning Using a Novel Digital Controller, Proceedings of the 2015 ICU International Congress on Ultrasonics, Metz, France (2015), p.63–67.

DOI: 10.1016/j.phpro.2015.08.043

Google Scholar