In Situ Topology Measurement of Micro Structured Surfaces with a Confocal Chromatic Sensor on a Desktop Sized Machine Tool

Abstract:

In this research a confocal chromatic point sensor was implemented in a desktop sized machine tool. The sensor was used to detect the surface in z-direction. Data from the machine control of the x- and y-axes is extracted and combined with the z- information of the sensor to directly scan surfaces. With the presented sensor, micro structures as small as 5 μm can be characterized. Based on the possibilities of this measuring system, face milling before the actual micro machining can be avoided by determining tilts and waviness of the workpiece. Also the effective tool diameter can be determined and compensated. After machining, the structure can be measured for quality control. Based on this measurement system, a micro machining process was developed broadening the potential for the use of desktop sized machine tools.

• Periodical: Advanced Materials Research (Volume 1140)
• Pages: 392-399
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1140.392
• Online since: August 2016
• Authors: Christopher Müller*, Ingo G. Reichenbach, Martin Bohley, Jan Christian Aurich
• Keywords: Confocal Chromatic Measurement, Micro Machining, Modular Design

References

[1] D. Dornfeld, S. Mina, Y. Takeuchi: Recent Advances in Mechanical Micromachining. CIRP Annals, 55 (2006) 2: pp.745-768.

DOI: 10.1016/j.cirp.2006.10.006

[2] Anselme, K. et al.: Jounal of Adhesion Science and Technologie 24 (2010). p.831–852.

[3] E. B. Brousseau, S.S. Dimov, D.T. Pham: Some recent advances in multi-material micro- and nano-manufacturing. Manufacturing Engineering Centre, Cardiff University: Springerverlag Berlin Heidelberg (2009). pp.161-180.

DOI: 10.1007/s00170-009-2214-5

[4] H.N. Hansen, R.J. Hocken, G. Tosello: Replication of micro and nano surface geometries. CIRP Annals - Manufacturing Technology 60 (2011). p.695–714.

DOI: 10.1016/j.cirp.2011.05.008

[5] A. Schubert, S. Groß, B. Schulz, U. Eckert: Sequential combination of micro-milling and laser structuring for manufacturing of complex micro-fluidic structures. Physics Procedia 12 (2011). p.221–229.

DOI: 10.1016/j.phpro.2011.03.127

[6] J.C. Aurich, I.G. Reichenbach, G.M. Schueler, Manufacture and application of ultra-small micro end mills, CIRP Annals - Manufacturing Technology 61 (1) (2012). p.83–86.

DOI: 10.1016/j.cirp.2012.03.012

[7] D.J. Guckenberger, T.E. de Groot, A.M. Wan, D.J. Beebe, E.W. Young: Micromilling: a method for ultra-rapid prototyping of plastic microfluidic devices. Lab Chip 15 (11) (2015). p.2364–2378.

DOI: 10.1039/c5lc00234f

[8] I.G. Reichenbach, J.C. Aurich: Application of CAD/CAM and micro end mills with 20 to 120 µm diameter for the direct machining of microstructures in PMMA. Advanced Materials Research 907 - Proceedings of the WGP Congress 2012 - Progress in Production Engineering (2014).

DOI: 10.4028/www.scientific.net/amr.907.299

[9] J.P. Wulfsberg, A. Verl, K.H. Wurst, S. Grimske , C. Batke, T. Heinze: Modularity in small machine tools. Production Engineering 7 (5) (2013). pp.483-490.

DOI: 10.1007/s11740-013-0464-4

[10] H. J Jordan, M. Wegner and H. Tiziani: Highly accurate non-contact characterization of engineering surfaces using confocal microscopy. Measurement Science and Technology 9 (198) 7.

DOI: 10.1088/0957-0233/9/7/023

[11] Schmidt, K.H.: Mikrofräswerkzeuge aus Hartmetall - Systeme für Herstellung und Anwendung, 2006, Dissertation Technische Universität Kaiserslautern.

[12] Rogers D.F.: Procedural Elements of Computer Graphics, 2nd edition. McGraw-Hill Science/Engineering/Math, (1997).

[13] K.G. Prateek, V. Pushpneel, A. Bhardwaz: A Survey Paper on Various Median Filtering Techniques for Noise Removal from Digital Images. American International Journal of Research in Formal, Applied & Natural Sciences, 2014 pp.43-47.

[14] J.Y. Zhang, Y. Chen, X.X. Huang: Edge Detection of Images Based on Improved Sobel Operator and Genetic Algorithms. Xi'an Research Institute of High-tech, China, (2009).