Diamond Pad Conditioners with Oriented Polycrystalline Diamond Cubes
Sintered polycrystalline diamond cubicles were oriented to make CMP pad conditioners. The dressing experiments demonstrated the capability of fast pad cutting and efficient removal of glazed layer that is formed by polishing wafers with slurry on dressed pad.
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
Y. T. Chen et al., "Diamond Pad Conditioners with Oriented Polycrystalline Diamond Cubes", Advanced Materials Research, Vols. 126-128, pp. 326-331, 2010