Diamond Pad Conditioners with Oriented Polycrystalline Diamond Cubes

Abstract:

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Sintered polycrystalline diamond cubicles were oriented to make CMP pad conditioners. The dressing experiments demonstrated the capability of fast pad cutting and efficient removal of glazed layer that is formed by polishing wafers with slurry on dressed pad.

Info:

Periodical:

Advanced Materials Research (Volumes 126-128)

Edited by:

Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso

Pages:

326-331

DOI:

10.4028/www.scientific.net/AMR.126-128.326

Citation:

Y. T. Chen et al., "Diamond Pad Conditioners with Oriented Polycrystalline Diamond Cubes", Advanced Materials Research, Vols. 126-128, pp. 326-331, 2010

Online since:

August 2010

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Price:

$35.00

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