Mosaic Diamond Disks with Brazed Pallets for CMP

Ying Tung Chen; Chen Chin Yu; Cheng Shiang Chou; Chih Chung Chou; Yang Liang Pai; Zong Qing Yang; Mu Han Cheng; Tien Chen Hu; Michael Sung; James C. Sung

doi:10.4028/www.scientific.net/AMR.126-128.332

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 126-128Mosaic Diamond Disks with Brazed Pallets for CMP

Mosaic Diamond Disks with Brazed Pallets for CMP

Abstract:

Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of diamond grits, with the aim to achieve two different functions, viz. glaze shaving and asperities grooving. Cocktail diamond disks are made by assembling brazed diamond pallets that contain different types of diamond crystals. Thus, the pad can be dressed clean, and at the same time, asperities may polish wafers fast without damaging.

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Periodical:

Advanced Materials Research (Volumes 126-128)

Pages:

332-337

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.126-128.332

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Online since:

August 2010

Authors:

Ying Tung Chen, Chen Chin Yu, Cheng Shiang Chou, Chih Chung Chou, Yang Liang Pai, Zong Qing Yang, Mu Han Cheng, Tien Chen Hu, Michael Sung, James C. Sung

Keywords:

CMP, Diamond Disk, Pad Conditioner, Semiconductor

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References

[1] J. Sung, and Y. L. Pai: CMP Pad Dresser：A Diamond Grid Solution, Proceedings of the Society of Grinding Engineers (2000), pp.189-196.

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[2] Y. T. Chen, C. Y. Lin, J. C. Sung, C. S. Chou, M. Y. Tsai and M. Sung: The Clear Cutting of CMP Pads By Polycrystalline Diamond Blades, International Conference on Planarization/CMP Technology (2008), pp.112-118.

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[3] C. M. Sung and M. Sung, U.S. Patent Application 20090068937. (2009).

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