Mosaic Diamond Disks with Brazed Pallets for CMP

Abstract:

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Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of diamond grits, with the aim to achieve two different functions, viz. glaze shaving and asperities grooving. Cocktail diamond disks are made by assembling brazed diamond pallets that contain different types of diamond crystals. Thus, the pad can be dressed clean, and at the same time, asperities may polish wafers fast without damaging.

Info:

Periodical:

Advanced Materials Research (Volumes 126-128)

Edited by:

Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso

Pages:

332-337

DOI:

10.4028/www.scientific.net/AMR.126-128.332

Citation:

Y. T. Chen et al., "Mosaic Diamond Disks with Brazed Pallets for CMP", Advanced Materials Research, Vols. 126-128, pp. 332-337, 2010

Online since:

August 2010

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Price:

$35.00

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