Friction and Wear of Polished Single Crystal Silicon at Different Area

Shou Xin Yu; D.W. Zou; X.L. Zhu; Yu Li Sun; L. Zhou

doi:10.4028/www.scientific.net/AMR.142.117

Paper Titles

Investigation of the Precipitation in Mg-Zr Alloys
p.99

The Optimization of Cutting Parameter of Machining the Small Diameter Deep Hole on Austenitic Stainless Steel
p.103

An Analysis of Drawing Process in Stamping Die Design for the Wheel Hub
p.107

Effects of Residual Stress on Interfacial Bonding Strength of Zinc-Plated Film
p.112

Friction and Wear of Polished Single Crystal Silicon at Different Area
p.117

Numerical Simulation of the Machining Distortion of Aircraft Aluminum Part Caused by Redistribution of Residual Stress
p.122

Study on Fuzzy D-S Evidence Theory Mathematics Foundation Based on the Form Prototype
p.126

Study on the Influence of Internal Flow Field in Pipeline Elbow by the Guide Plate
p.130

Research on Electrical Resistively of Wood Dust
p.134

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 142Friction and Wear of Polished Single Crystal...

Friction and Wear of Polished Single Crystal Silicon at Different Area

Abstract:

A friction and wear experiment was carried out at different areas of single crystal silicon under same surface roughness. Friction mechanisms at different area were analyzed by STM and 3D profiler. The result showed that the friction and wear properties were obviously different at different area although they had same surface roughness. The friction and wear properties of the single crystal silicon where closest to inner-cycle internal were best while the farther from the inner-cycle silicon area or closer to crystal silicon cylindrical, the worse friction and wear properties were. Abrasive wear and adhesive wear were the primary wear mechanisms.

You might also be interested in these eBooks

Advanced Design and Manufacturing Technology I

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 142)

Pages:

117-121

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.142.117

Citation:

Cite this paper

Online since:

October 2010

Authors:

Shou Xin Yu, D.W. Zou, X.L. Zhu, Yu Li Sun, L. Zhou

Keywords:

Friction Mechanism, Friction Property, Single Crystal Silicon, Surface Roughness (SR), Tribology, Wear Property

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Jakubowski A, Lukasial L and Jurczak M.: Phys. of semicon Vol. 99(2000), pp.297-302.

Google Scholar

[2] Tricard M, Kassir S and Heron P.: American Society for Precision Engineering Vol. 4(1998), pp.305-310.

Google Scholar

[3] Illuzzi F: Silicon wafer requirements for ULSI device processing (Scitee publications, Switzerland 2002).

Google Scholar

[4] Karuppiah L, Swedek B, Thothadri M, et al. Equipment for Electronic Products Manufacturing Vol. 153( 2007), pp.1-9, 13.

Google Scholar

[5] Hahn P O.: Microelectronic Engineering Vol. 56 (2001), pp.3-13.

Google Scholar

[6] Sun Yuli, Zuo Dunwen, Zhu Yongwei, et al.: AEROSPACE MATERIALS & TECHNOLOGY, (2006), No. 5, pp.21-26.

Google Scholar

[7] Gehman B L.: Solid State Technology Vol. 44 (2001), pp.127-128.

Google Scholar

[8] Luo J F, Dornfield D A.: IEEE transactions on Semiconductor Manufacturing Vol. 14 (2001), pp.112-133.

Google Scholar

[9] Sun Yuli: Basic Research on CMP of Silicon Wafer with Ice Fixed Abrasives (Dissertation of Nanjing University of Aeronautics and Astronautics, 2008).

Google Scholar