The sol-gel method was employed to prepare the Eu3+-doped TiO2 thin films. The influence of doping concentration and annealing temperature on the structures and photoluminescence (PL) properties was investigated. The result of X-ray diffraction revealed that all the films are of anatase phase. It is shown that the PL intensities of the films increased with Eu3+ concentration and reached the maximum at 1.4 mol%, then decreased with the concentration. Observed anatase phase appeared at temperature above 400 °C, and the luminescence intensity increased with the increase of annealing temperature.