Studying on Preparation of AZO Thin Films with Sol-Gel Method

Xiu Ling Lv; Yu Bo Dou; Juan Wang; Ying Xu

doi:10.4028/www.scientific.net/AMR.152-153.868

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 152-153Studying on Preparation of AZO Thin Films with...

Studying on Preparation of AZO Thin Films with Sol-Gel Method

Abstract:

Al doped ZnO thin films（AZO films） was prepared by sol-gel method. The influence of Parameters of different processes on the crystallization properties, micro-morphology and optical properties of this kind of films were studied, using by X-ray diffractometer, filed emission stereoscan, spectral photometer, hall admeasuring apparatus. The results indicated that the crystallization properties, micro-morphology and optical properties of Al doped ZnO films were best on the condition that the sol density was 0.5mol/L, hat treatment temperature is 600 and there is a 8-layer coating.

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Periodical:

Advanced Materials Research (Volumes 152-153)

Pages:

868-873

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.152-153.868

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Online since:

October 2010

Authors:

Xiu Ling Lv, Yu Bo Dou, Juan Wang, Ying Xu

Keywords:

AZO Thin Film, Doping Mechanism, Sol-Gel (SG)

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