Studying on Preparation of AZO Thin Films with Sol-Gel Method
Al doped ZnO thin films（AZO films） was prepared by sol-gel method. The influence of Parameters of different processes on the crystallization properties, micro-morphology and optical properties of this kind of films were studied, using by X-ray diffractometer, filed emission stereoscan, spectral photometer, hall admeasuring apparatus. The results indicated that the crystallization properties, micro-morphology and optical properties of Al doped ZnO films were best on the condition that the sol density was 0.5mol/L, hat treatment temperature is 600 and there is a 8-layer coating.
Zhengyi Jiang, Jingtao Han and Xianghua Liu
X. L. Lv et al., "Studying on Preparation of AZO Thin Films with Sol-Gel Method", Advanced Materials Research, Vols. 152-153, pp. 868-873, 2011