Scale Effect of Vibration Mode of Micro-Beam in MEMS under Electrostatic-Mechanical Coupling

Abstract:

In order to determine and actively design the vibration characteristics of micro-cantilever in the MEMS devices, it is highly necessary to research on the modal analysis of micro-cantilever which is driven by electrostatic force. This paper analyzes the coupling of mechanical and electrical coupling beam based on the direct coupling method, applies ANSYS software into creating the model of the micro-cantilever to simulation of electromechanical coupling, and establishes the quantitative impact analysis model between natural frequency of vibration and the thickness of a micro-beam with Trans126 transducer element, through directly embedding intrinsic characteristic length of micro-cantilever beam to the scale effect of vibration mode. The main conclusion is that when the thickness of micro-beam is close to the characteristics size of the materials, the natural frequency will show a significant scale effect phenomenon.

• Periodical: Advanced Materials Research (Volumes 160-162)
• Pages: 1420-1424
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.160-162.1420
• Online since: November 2010
• Authors: Mei Qin Chen, Ji Long Su
• Keywords: Characteristic Length, Micro Cantilever, Natural Frequency, Scale Effect

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