In this paper, an elastic deformation of the axial foil hydrodynamic thrust bearing used in 100KW gas turbine generator is studied. The finite element model of the foil hydrodynamic thrust bearing was established using Solidworks and ANSYS. The foil hydrodynamic thrust bearing which considered foil deformation was analyzed and calculated based on the results of the approximate calculation. The FEA model considered the interaction of plane foil deformation and wave foil. The wave foil was not hypothesized as the linear distributed spring when set up the finite element model. The ANSYS results have demonstrated that the deformation of foil bearing designed based on the result of numerical calculation can meet the requirement of minimal film thickness of bearing lubricant layer.