A Kind of Non-Contact Measurement System for Areal Surface Texture

Sheng Huai Wang; Yu Rong Chen; Tie Bang Xie

doi:10.4028/www.scientific.net/AMR.189-193.1263

Paper Titles

Research on Mechanism of Polymer Inhibiting Secondary Reaction in Clinker Leaching Process
p.1242

Study on the Corrosion Resistance and Wear Resistance of Micro-Arc Oxidation Coatings on the Clad Plate of Aluminum and Magnesium Alloy
p.1248

Calibration Methods of an On-Line Inspection System on a Large-Scale Turning-Milling Machining Center
p.1253

Influence of Annealing Temperature on the Antibacterial Activities and Photoactivity of N-Doped TiO₂ Films by Ion Beam Assistance
p.1258

A Kind of Non-Contact Measurement System for Areal Surface Texture
p.1263

Study on the Brush Plating Technology of GH34 Heat-Resisting Steels
p.1271

Evolution of Crystalline Phase and Morphology of the Products Formed during the Hydrothermal Synthesis of Y₂O₃ Powders
p.1275

Study on Micro-Arc Oxidation Composite Ceramic Coating Properties in the Textile Machinery Spare Parts
p.1280

The Corrosion Mechanism of Zn-5%Al-0.3%Mg Coating
p.1284

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 189-193A Kind of Non-Contact Measurement System for Areal...

A Kind of Non-Contact Measurement System for Areal Surface Texture

Abstract:

For the measurement of areal surface texture, a non-contact measurement method for areal surface texture based on the co-integration of optical microscopy image measurement and white light microscopy interference measurement is proposed, which measures not only 2D size of length but also 3D surface texture. Based on this method, a 2D&3D optical microscopy measurement system for areal surface texture has been developed. It consists of compound optical microscopy imaging system, 3D precision displacement system, hardware circuit, and corresponding software. The practicality and effectiveness of the proposed method of measurement have been verified by the measurement results.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 189-193)

Pages:

1263-1270

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.189-193.1263

Citation:

Cite this paper

Online since:

February 2011

Authors:

Sheng Huai Wang, Yu Rong Chen, Tie Bang Xie

Keywords:

3D Displacement System, CCD Calibration, Microscopy Image, Moving Strategy, Stitching, Surface Texture, White Light Interference

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] X. Jiang, P.J. Scott, D.J. Whitehouse, L. Blunt. Paradigm shifts in surface metrology. Part I. Historical philosophy. Proc. R. Soc. 2007. 9. 8, 463: 2049-(2070).

DOI: 10.1098/rspa.2007.1874

Google Scholar

[2] X. Jiang, P.J. Scott, D. J Whitehouse, L. Blunt. Paradigm shifts in surface metrology. Part II. The current shift. Proc. R. Soc. 2007. 9. 8, 463: 2071-(2099).

DOI: 10.1098/rspa.2007.1873

Google Scholar

[3] Royal Society and Royal Academy of Engineering Report 2004, Nanoscience and nanotechnologies: opportunities and uncertainties. www. royalsoc. ac. uk.

Google Scholar

[4] R.K. Leach, D.R. Flack, E.B. Hughes, C.W. Jones. Development of a new traceable areal surface texture measuring instrument. Wear, 2009, 266(5-6): 552-554.

DOI: 10.1016/j.wear.2008.04.072

Google Scholar

[5] Xin Li, Yurong Chen, Shenghuai Wang, and Tiebang Xie. Design of a large area 2D microscopy image measurement system. Proc. SPIE, 2010, 7656: 765630.

Google Scholar

[6] Shenghuai Wang, Xin Li, Yurong Chen, and Tiebang Xie. Design of a large area 3D surface structure measurement system. Proc. SPIE, 2010, 7656: 76562Z.

Google Scholar

[7] Shenghuai Wang, Yurong Chen, Shuzhen Wang, Tiebang Xie. Design of 3D precision displacement system [J]. Optics and Precision Engineering, 2010, 18(1): 175-182. (in Chinese).

Google Scholar

[8] Masashi Otsubo, Katsuyuki Okada, Jumpel Tsujiuchi. Measurement of large plane surface shapes by connecting small-aperture interferograms. Optical Engineering, 1993, 33(2): 608-613.

DOI: 10.1117/12.152248

Google Scholar