Ziegler-Nichols Based Intelligent Fuzzy PID Controller Design of a SPM System with Parameters Variation

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Abstract:

This research is to extend Ziegler-Nichols based PID controller design method to the intelligent fuzzy PID controller design of a Scanning Probe Microscope (SPM) system, thus the relative stability can be reserved. In addition, one can see the hysteresis and parameters variation effects of the force actuator can be reduced. This improvement had been verified by practical implementation. Comparing the results with the design with the Ziegler-Nichols based PID controller, one can see that the proposed system is more robust.

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Advanced Materials Research (Volumes 201-203)

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2113-2118

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February 2011

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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