Design and Characterization of Novel Millimeter-Wave MEMS CPW Transmission Lines

Jian Ming Huang; Y. L. Zhou; H. Guo

doi:10.4028/www.scientific.net/AMR.204-210.577

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 204-210Design and Characterization of Novel...

Design and Characterization of Novel Millimeter-Wave MEMS CPW Transmission Lines

Abstract:

The design and development of novel microelectromechanical systems’ (MEMS) coplanar waveguide (CPW) transmission lines, using microshield and groove, are presented in the paper to operate between 5–60 GHz. The quasi-static capacitances of CPW are calculated using the conformal mapping technique to express the propagation properties, i.e., the characteristic impedance and effective permittivity. Simulation results have shown a considerable loss reduction to levels that compare favorably with the conventional CPW. These transmission lines can be widely used in the development of phase shifters, filters, and antennas, because of their advantages in loss reduction and improvement in the performance.

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Periodical:

Advanced Materials Research (Volumes 204-210)

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577-582

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.204-210.577

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Online since:

February 2011

Authors:

Jian Ming Huang, Y. L. Zhou, H. Guo

Keywords:

CPW, Groove, Low Loss, Micro-Electromechanical System (MEMS), Microshield

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