Design and Characterization of Novel Millimeter-Wave MEMS CPW Transmission Lines
The design and development of novel microelectromechanical systems’ (MEMS) coplanar waveguide (CPW) transmission lines, using microshield and groove, are presented in the paper to operate between 5–60 GHz. The quasi-static capacitances of CPW are calculated using the conformal mapping technique to express the propagation properties, i.e., the characteristic impedance and effective permittivity. Simulation results have shown a considerable loss reduction to levels that compare favorably with the conventional CPW. These transmission lines can be widely used in the development of phase shifters, filters, and antennas, because of their advantages in loss reduction and improvement in the performance.
Helen Zhang, Gang Shen and David Jin
J. M. Huang et al., "Design and Characterization of Novel Millimeter-Wave MEMS CPW Transmission Lines", Advanced Materials Research, Vols. 204-210, pp. 577-582, 2011